Used Brooks Spartan Wafer Robot

Name: Used Brooks Spartan Wafer Robot
Brand: Brooks Automation

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Brooks Spartan Wafer Robot moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Brooks Spartan Wafer Robot cost in 2026?

Pricing for used Used Brooks Spartan Wafer Robot units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Brooks Automation Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks Spartan Wafer Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Brooks Spartan Wafer Robot Specifications and Compatible Tools

Key specs: 220V AC, 3-phase power; 5kg payload capacity; 0.05mm repeatability; 1.5m/s maximum speed. Compatible with:

Applied Materials Centura (models 5500/6500, 1998–2005)
Lam Research Etch (model 2300, 2000–2003)
KLA-Tencor Metrology (model 8800, 1999–2002)
Exclusion: Not compatible with Tokyo Electron Ltd. HDP-CVD systems (part # TE-SP-3456) due to conflicting Z-axis travel limits. Verify tool’s robotic interface protocol (RS-232 vs. Ethernet/IP) before purchase.

What to Check Before Buying a Used Brooks Spartan Wafer Robot in 2026

Mechanical wear: Measure joint play with a dial gauge; reject if >0.1mm radial clearance in wrist bearings.
Electrical integrity: Use a multimeter to confirm 220V±10% stability under load; check for servo motor insulation resistance <10MΩ.
Repeatability test: Run a 100-cycle precision audit with a laser tracker; ±5µm deviation is acceptable.
Corrosion inspection: Disassemble end-effector; reject if stainless-steel components show pitting >0.2mm deep.
Lifecycle metrics: Request maintenance logs; avoid units with >12,000 cumulative process hours (typical MTBF drops 30% post-threshold).

FAQ

Q: What tools are compatible with the Brooks Spartan?
A: Check for 200mm wafer chambers with SCARA robot interfaces, such as Applied Materials Centura 5500 or Lam 2300 Etch.

Q: Used vs. refurbished Brooks Spartan – which is better?
A: Refurbished units include replaced servos and updated PLCs; used saves 75% but requires bearing inspection.

Q: How to test a Spartan robot’s vacuum compatibility?
A: Use a leak-rate test with helium mass spectrometer; <1×10⁻⁶ mbar·L/s is required for PVD tools.