Used Brooks Spartan Wafer Robot

Name: Used Brooks Spartan Wafer Robot
Brand: Brooks Automation
Price: 4750 USD
Availability: InStock

Market Price

→ Stable

$2K–$8K

Typical secondary market pricing · USD

Low $1,500Avg $4,750High $8,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $2K – $8K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Used Brooks Spartan Wafer Robot

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Used Brooks Spartan Wafer Robot cost in 2026?

A used Used Brooks Spartan Wafer Robot from Brooks Automation typically sells for $2k – $8k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Brooks Automation Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks Spartan Wafer Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Brooks Spartan Wafer Robot Cost in 2026?

Used units typically range from $15,000 to $25,000, depending on cycle count and servo motor condition. Refurbished models with replaced actuators and updated firmware cost $30,000–$40,000, saving 65–70% vs. new ($100k+). Savings drop to 50% if the unit requires vacuum pump replacement (common after 10,000+ process cycles). Caveat: Robots with >8 years of continuous operation (pre-2018 vintage) often exhibit bearing wear exceeding 0.1mm, which adds $5k–$8k to repair costs.

Brooks Spartan Wafer Robot Specifications and Compatible Tools

Key specs: 220V AC, 3-phase power; 5kg payload capacity; 0.05mm repeatability; 1.5m/s maximum speed. Compatible with:

Applied Materials Centura (models 5500/6500, 1998–2005)
Lam Research Etch (model 2300, 2000–2003)
KLA-Tencor Metrology (model 8800, 1999–2002)
Exclusion: Not compatible with Tokyo Electron Ltd. HDP-CVD systems (part # TE-SP-3456) due to conflicting Z-axis travel limits. Verify tool’s robotic interface protocol (RS-232 vs. Ethernet/IP) before purchase.

What to Check Before Buying a Used Brooks Spartan Wafer Robot in 2026

Mechanical wear: Measure joint play with a dial gauge; reject if >0.1mm radial clearance in wrist bearings.
Electrical integrity: Use a multimeter to confirm 220V±10% stability under load; check for servo motor insulation resistance <10MΩ.
Repeatability test: Run a 100-cycle precision audit with a laser tracker; ±5µm deviation is acceptable.
Corrosion inspection: Disassemble end-effector; reject if stainless-steel components show pitting >0.2mm deep.
Lifecycle metrics: Request maintenance logs; avoid units with >12,000 cumulative process hours (typical MTBF drops 30% post-threshold).

FAQ

Q: What tools are compatible with the Brooks Spartan?
A: Check for 200mm wafer chambers with SCARA robot interfaces, such as Applied Materials Centura 5500 or Lam 2300 Etch.

Q: Used vs. refurbished Brooks Spartan – which is better?
A: Refurbished units include replaced servos and updated PLCs; used saves 75% but requires bearing inspection.

Q: How to test a Spartan robot’s vacuum compatibility?
A: Use a leak-rate test with helium mass spectrometer; <1×10⁻⁶ mbar·L/s is required for PVD tools.

**Q: Brooks Spartan vs. Adept V