EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara)

Name: EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara)
Brand: Ebara
SKU: EV-A20WN
Price: 5050 USD
Availability: InStock

Part No. EV-A20WN

Market Price

→ Stable

2 active listings

$3K–$7K

Typical secondary market pricing · USD

Low $2,710Avg $5,050High $7,390

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $3K – $7K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara) cost in 2026?

A used EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara) from Ebara typically sells for $3k – $7k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Ebara Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does EV-A20WN Cost in 2026?

In 2026, used EV-A20WN units range from $2,710–$7,390, depending on condition and service history. Refurbished models (with <10,000 cumulative runtime hours) typically command $5,500–$7,390, while used-as-is units (often with >40,000 RF-hours) start at $2,710–$4,200. New OEM list price exceeds $15,000, making used/refurbished options 50–70% cheaper. Caveat: Units with >50,000 total operating hours show >25% higher failure rates in field testing (per 2026 Caladansemi data). Always verify runtime logs and rotor wear metrics before purchase.

EV-A20WN Specifications and Compatible Tools

Key specs: 3-phase 200V, 50/60Hz, 2.2kW motor; max vacuum 0.1–100 Pa; flow rate 20 m³/min. Compatible with Lam 2300 series (2010–2018), AMAT Centura platforms (2012–2020), and TEL etch/CVD systems (2015–2022). Warning: EV-A20WN is not compatible with Ebara EV-A15WN motor variants due to mismatched rotor clearances (0.15mm vs. 0.10mm). Always cross-check motor part number (tagged on the pump’s nameplate) before installation.

What to Check Before Buying a Used EV-A20WN in 2026

Rotor gap measurement: Use a digital micrometer to confirm clearance is ≤0.15mm (spec for EV-A20WN). Gaps >0.18mm indicate excessive wear.
Motor insulation resistance: Test with a megohmmeter; readings <10MΩ at 500VDC require rewinding.
Timing gear condition: Inspect for pitting or scoring; replace if gear teeth show >0.2mm wear.
Seal integrity: Perform a helium leak test at 10⁻⁴ Pa·m³/s; failures >5% indicate seal replacement.
Service history: Reject units with >60,000 total operating hours or no maintenance records post-2022.

Q: Is the EV-A20WN better than the EV-A15WN for Lam 2300 tools?
A: No. The EV-A15WN is the correct part for Lam 2300 series. The EV-A20WN has a higher flow rate and incompatible rotor design.

Q: Can I use a 2020-manufactured EV-A20WN in a 2015 TEL etcher?
A: Yes, but confirm the TEL system’s motor control module is firmware version 3.2 or newer to handle the EV-A20WN’s 2.2kW draw.

Q: How long does a used EV-A20WN last after 2026?
A: With <20,000 runtime hours and proper maintenance, expect 3–5 years of service in non-24/7 operations.

Q: What’s the difference between “used” and “refurbished” listings?
A: Refurbished units include replaced rotors, seals, and insulation (certified for 18 months). Used-as-is units require buyer to verify all components.