EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara)

Name: EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara)
Brand: Ebara
SKU: EV-A20WN

Part No. EV-A20WN

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara) cost in 2026?

Pricing for used EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Ebara Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used EV-A20WN — EV-A20WN Claw-Type Dry Vacuum Pump (Ebara) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

EV-A20WN Specifications and Compatible Tools

Key specs: 3-phase 200V, 50/60Hz, 2.2kW motor; max vacuum 0.1–100 Pa; flow rate 20 m³/min. Compatible with Lam 2300 series (2010–2018), AMAT Centura platforms (2012–2020), and TEL etch/CVD systems (2015–2022). Warning: EV-A20WN is not compatible with Ebara EV-A15WN motor variants due to mismatched rotor clearances (0.15mm vs. 0.10mm). Always cross-check motor part number (tagged on the pump’s nameplate) before installation.

What to Check Before Buying a Used EV-A20WN in 2026

Rotor gap measurement: Use a digital micrometer to confirm clearance is ≤0.15mm (spec for EV-A20WN). Gaps >0.18mm indicate excessive wear.
Motor insulation resistance: Test with a megohmmeter; readings <10MΩ at 500VDC require rewinding.
Timing gear condition: Inspect for pitting or scoring; replace if gear teeth show >0.2mm wear.
Seal integrity: Perform a helium leak test at 10⁻⁴ Pa·m³/s; failures >5% indicate seal replacement.
Service history: Reject units with >60,000 total operating hours or no maintenance records post-2022.

Q: Is the EV-A20WN better than the EV-A15WN for Lam 2300 tools?
A: No. The EV-A15WN is the correct part for Lam 2300 series. The EV-A20WN has a higher flow rate and incompatible rotor design.

Q: Can I use a 2020-manufactured EV-A20WN in a 2015 TEL etcher?
A: Yes, but confirm the TEL system’s motor control module is firmware version 3.2 or newer to handle the EV-A20WN’s 2.2kW draw.

Q: How long does a used EV-A20WN last after 2026?
A: With <20,000 runtime hours and proper maintenance, expect 3–5 years of service in non-24/7 operations.

Q: What’s the difference between “used” and “refurbished” listings?
A: Refurbished units include replaced rotors, seals, and insulation (certified for 18 months). Used-as-is units require buyer to verify all components.