✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

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Ebara

Used Ebara Dry Vacuum Pump

Name: Used Ebara Dry Vacuum Pump
Brand: Ebara
Price: 9500 USD
Availability: InStock

Market Price

↓ Falling

1 active listing

$3K–$7K

Typical secondary market pricing · USD

Low $2,710Avg $9,500High $7,390

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $10K – $10K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market DataEbara Dry Pump

Trending Down

Price Range

$3K — $7K

Based on verified secondary market transactions

Last Sold

$4,800

Apr 26, 2026

Refurbished

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How much does a used Used Ebara Dry Vacuum Pump cost in 2026?

A used Used Ebara Dry Vacuum Pump from Ebara typically sells for $10k – $10k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Ebara Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Ebara Dry Vacuum Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Ebara Dry Vacuum Pump Cost in 2026?

In 2026, used Ebara dry vacuum pumps (claw/screw design) range from $2,710 for reconditioned units to $7,390 for low-hour, factory-sealed models. Refurbished variants with <2,000 operating hours save 42–58% vs new (priced ~$12,000–$15,000). Caveat: Pumps with >5,000 cumulative operating hours and no recent rotor resurfacing typically depreciate 18–22% further. Market demand spikes for 480V, 3-phase models compatible with 2000s-era deposition tools.

Ebara Dry Vacuum Pump Specifications and Compatible Tools

Key specs: max vacuum 10⁻¹ mbar, flow rate 50–300 m³/h, power 7.5–15 kW, voltage 480V AC, frequency 60Hz. Compatible with:

Applied Materials Centura 5500 (1998–2005)
Lam Research Endace 5500i (2000–2007)
ASM EpiCore 5500 Series (2002–2006)
Exclusion: Not compatible with Axcelis 3200 Series ion implanters (pressure requirements exceed 10⁻¹ mbar). Verify tool’s vacuum interface dimensions (typically ISO 609 80mm flange) before purchase.

What to Check Before Buying a Used Ebara Dry Vacuum Pump in 2026

Rotor wear: Measure gap with micrometer; reject if >0.05mm beyond OEM spec (0.02–0.03mm).
Seal integrity: Perform dye penetrant test on claw/screw seals; cracks >0.1mm void warranty.
Vacuum performance: Test with mercury manometer; must sustain 10⁻¹ mbar for 10 minutes.
Motor insulation: Use megohmmeter; resistance <100 MΩ indicates rotor winding degradation.
Service history: Reject units without documented rebuilds since 2021 (typical 5-year lifecycle for seals/bearings).

FAQ

Q: How many operating hours can a used Ebara dry pump sustain?
A: 8,000–12,000 hours with annual rotor resurfacing; exceeds 15-year lifespan in low-duty cycles.

Q: Used vs refurbished Ebara pumps—what’s the difference?
A: Refurbished units include replaced seals, bearings, and rotor coatings; used may retain original parts.

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