Used Ebara Dry Vacuum Pump

Name: Used Ebara Dry Vacuum Pump
Brand: Ebara

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Ebara Dry Vacuum Pump moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Ebara Dry Vacuum Pump cost in 2026?

Pricing for used Used Ebara Dry Vacuum Pump units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Ebara Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Ebara Dry Vacuum Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Ebara Dry Vacuum Pump Specifications and Compatible Tools

Key specs: max vacuum 10⁻¹ mbar, flow rate 50–300 m³/h, power 7.5–15 kW, voltage 480V AC, frequency 60Hz. Compatible with:

Applied Materials Centura 5500 (1998–2005)
Lam Research Endace 5500i (2000–2007)
ASM EpiCore 5500 Series (2002–2006)
Exclusion: Not compatible with Axcelis 3200 Series ion implanters (pressure requirements exceed 10⁻¹ mbar). Verify tool’s vacuum interface dimensions (typically ISO 609 80mm flange) before purchase.

What to Check Before Buying a Used Ebara Dry Vacuum Pump in 2026

Rotor wear: Measure gap with micrometer; reject if >0.05mm beyond OEM spec (0.02–0.03mm).
Seal integrity: Perform dye penetrant test on claw/screw seals; cracks >0.1mm void warranty.
Vacuum performance: Test with mercury manometer; must sustain 10⁻¹ mbar for 10 minutes.
Motor insulation: Use megohmmeter; resistance <100 MΩ indicates rotor winding degradation.
Service history: Reject units without documented rebuilds since 2021 (typical 5-year lifecycle for seals/bearings).

FAQ

Q: How many operating hours can a used Ebara dry pump sustain?
A: 8,000–12,000 hours with annual rotor resurfacing; exceeds 15-year lifespan in low-duty cycles.

Q: Used vs refurbished Ebara pumps—what’s the difference?
A: Refurbished units include replaced seals, bearings, and rotor coatings; used may retain original parts.