Edwards iQDP/iXH Series Dry Pump

Name: Edwards iQDP/iXH Series Dry Pump
Brand: Edwards
Price: 3478 USD
Availability: InStock

Market Price

→ Stable

3 active listings

$1K–$6K

Typical secondary market pricing · USD

Low $1,445Avg $3,478High $5,510

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $1K – $6K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Edwards iQDP/iXH Series Dry Pump cost in 2026?

A used Edwards iQDP/iXH Series Dry Pump from Edwards typically sells for $1k – $6k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Edwards Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Edwards iQDP/iXH Series Dry Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Edwards iQDP/iXH Series Dry Pump Cost in 2026?

Used units range from $1,445–$5,510 in 2026, depending on service history and configuration. Refurbished models (certified by Edwards or Tier 1 partners) add $1,200–$1,800 to the base price. This represents 60–90% savings vs. new units (priced $12,000–$15,000). Caveat: Pumps with >10 years of service life or >50,000 operating hours (MTBF threshold) often require rotor seal replacement, adding $800–$1,500 in post-purchase costs. Always verify the unit’s cumulative runtime via Edwards’ PartSmart™ diagnostics before purchase.

Edwards iQDP/iXH Series Dry Pump Specifications and Compatible Tools

Key specs: 1,200–3,000 l/s pumping speed, 1×10⁻³ mbar ultimate pressure, 3-phase 400V 50/60Hz power, and 1.5–3.5kW motor. Compatible with Applied Materials Centura P5500 (2012–2018), Lam Research EtchStar 5500 (2014–2020), and ASMI Fusion F12 (2016–2022). Exclusion: Do not install on Tokyo Electron HARP-3000 (Model TH300-7A) without a flow adapter (Part #EDW-ADP-0421); mismatched inlet geometry causes 15–20% efficiency loss. Cross-reference the pump’s serial prefix (e.g., IQDP-2023 vs. iXH-2025) for tool-specific tolerances.

What to Check Before Buying a Used Edwards iQDP/iXH Series Dry Pump in 2026

Rotor seal integrity: Perform a helium leak test (<1×10⁻⁶ mbar·l/s max allowable leak rate).
Motor winding resistance: Use a megohmmeter; insulation resistance must exceed 100 MΩ at 500V DC.
Rotor wear: Measure clearance with a dial gauge; >0.15mm gap between rotor and housing indicates replacement.
Vibration analysis: Test with a triaxial accelerometer; peak vibration velocity must stay below 10 mm/s at 1,800 RPM.
Service lifecycle: Reject units with >85% of rated MTBF (50,000 hours) already logged without full-service overhaul.

FAQ

Q: Edwards iQDP vs iXH dry pump differences?
A: The iXH series supports higher flow rates (up to 3,000 l/s vs. 2,500 l/s on iQDP) and includes integrated heat exchangers for high-temperature processes.

Q: Can I use a 2018 iQDP on a 2024 fab tool?
A: Yes, if the tool’s vacuum interface matches ISO-KF32 standards. Confirm with the tool’s OEM for protocol compatibility.

**Q: How to verify a used pump’s