Edwards iQDP/iXH Series Dry Pump

Name: Edwards iQDP/iXH Series Dry Pump
Brand: Edwards

Market Price

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Available by Request

Last verified: 2026-05-11

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Edwards iQDP/iXH Series Dry Pump moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Edwards iQDP/iXH Series Dry Pump cost in 2026?

Pricing for used Edwards iQDP/iXH Series Dry Pump units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Edwards Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Edwards iQDP/iXH Series Dry Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Edwards iQDP/iXH Series Dry Pump Specifications and Compatible Tools

Key specs: 1,200–3,000 l/s pumping speed, 1×10⁻³ mbar ultimate pressure, 3-phase 400V 50/60Hz power, and 1.5–3.5kW motor. Compatible with Applied Materials Centura P5500 (2012–2018), Lam Research EtchStar 5500 (2014–2020), and ASMI Fusion F12 (2016–2022). Exclusion: Do not install on Tokyo Electron HARP-3000 (Model TH300-7A) without a flow adapter (Part #EDW-ADP-0421); mismatched inlet geometry causes 15–20% efficiency loss. Cross-reference the pump’s serial prefix (e.g., IQDP-2023 vs. iXH-2025) for tool-specific tolerances.

What to Check Before Buying a Used Edwards iQDP/iXH Series Dry Pump in 2026

Rotor seal integrity: Perform a helium leak test (<1×10⁻⁶ mbar·l/s max allowable leak rate).
Motor winding resistance: Use a megohmmeter; insulation resistance must exceed 100 MΩ at 500V DC.
Rotor wear: Measure clearance with a dial gauge; >0.15mm gap between rotor and housing indicates replacement.
Vibration analysis: Test with a triaxial accelerometer; peak vibration velocity must stay below 10 mm/s at 1,800 RPM.
Service lifecycle: Reject units with >85% of rated MTBF (50,000 hours) already logged without full-service overhaul.

FAQ

Q: Edwards iQDP vs iXH dry pump differences?
A: The iXH series supports higher flow rates (up to 3,000 l/s vs. 2,500 l/s on iQDP) and includes integrated heat exchangers for high-temperature processes.

Q: Can I use a 2018 iQDP on a 2024 fab tool?
A: Yes, if the tool’s vacuum interface matches ISO-KF32 standards. Confirm with the tool’s OEM for protocol compatibility.