Vacuum Valves — Used Edwards PV16PKA-B (Edwards)

How Much Does Used Edwards PV16PKA-B Cost in 2026?

The Used Edwards PV16PKA-B typically sells in the $1,000 range in 2026, with pricing dependent on condition and sourcing channel. Units in "Grade A" condition, with less than 10,000 operating hours and full documentation, can command up to $1,200. On the lower end, "Grade C" units with more than 20,000 hours and limited service history may be available for as low as $800, though these are not recommended for mission-critical applications. Refurbished units from vendors like Ferrotec and Axus Technology are commonly priced in the $1,000–$1,100 range, with a 40–60% cost savings compared to new PV16PKA-B valves, which can exceed $2,500.

Purchasing a used PV16PKA-B can save a facility $1,500–$1,700 per unit, which translates to significant savings when replacing multiple valves in a cluster tool. However, a failed valve can result in 4–6 hours of downtime during installation and testing, costing $3,000–$5,000 in lost production. It’s critical to ensure the unit has been properly tested and has a documented service history. Units with more than 25,000 operating hours are at higher risk of seal degradation and should be inspected closely before purchase.

Used Edwards PV16PKA-B Specifications and Compatible Tools

The Edwards PV16PKA-B is a high-vacuum butterfly valve designed for use in semiconductor process chambers and vacuum systems. It typically operates at pressures down to 10^-7 Torr and is rated for temperatures up to 120°C. The valve is commonly used in deposition and etch tools, including older models of Applied Materials Centura and Lam Research P5 systems from the 2000s. It is also found in some older Varian and Veeco tools.

The valve typically has a service life of 15,000–25,000 operating cycles before requiring major service or replacement. Units with more than 30,000 cycles may experience seal wear and should be inspected for leakage. It is not compatible with newer Edwards PV24 or PV32 models due to differences in actuator interface and sealing design. Attempting to install a PV16PKA-B into a PV24 system can cause misalignment and damage to the valve stem, resulting in a $2,000–$3,000 repair.

Always verify compatibility with the specific tool model and year of manufacture. A mismatch can lead to process instability and chamber contamination, which can cost $5,000–$10,000 in rework and downtime.

What to Check Before Buying a Used Edwards PV16PKA-B in 2026

1. Operating Hours and Cycles: Ensure the unit has less than 20,000 cycles and 15,000 operating hours. Units with more than 25,000 cycles are high-risk and may require seal replacement.
2. Leak Test: Request a helium leak test with a result below 1 x 10^-8 mbar·l/s. A leak above this threshold can lead to process failure and chamber contamination.
3. Seal Inspection: Check for wear on the Viton or EPDM seals. Any cracking or deformation is a hard reject.
4. Actuator Function: Test the solenoid actuator for full stroke and return. A sluggish actuator can delay process startup and cost $2,000–$3,000 in lost throughput.
5. Production Year: Units manufactured before 2008 may use older seal materials and should be inspected for compatibility with modern process gases.

Failure to verify these criteria can result in a faulty valve that causes 6–8 hours of downtime and $4,000–$6,000 in repair costs. Always request a full service report and pressure test results before finalizing the purchase.

FAQ

Q: Can I use a Used Edwards PV16PKA-B in a newer tool like the Lam P5i?
A: No. The PV16PKA-B is not compatible with the Lam P5i or other newer tools due to differences in actuator interface and sealing design. Attempting to install it can cause misalignment and damage, costing $2,000–$3,000 in repairs.

Q: Should I buy a PV16PKA-B with 22,000 cycles?
A: It depends. Units with 22,000 cycles are borderline. If the seal and actuator are in good condition and the unit has been recently serviced, it may be acceptable. However, units with more than 25,000 cycles are high-risk and should be avoided.

Q: How long does a PV16PKA-B typically last before needing replacement?
A: The typical service life is 15,000–25,000 cycles. After 25,000 cycles, seal wear becomes more common, and the valve should be inspected for leakage and performance degradation.

Q: How much can I save by buying a used PV16PKA-B instead of new?
A: You can save 40–60%, or $1,500–$1,700 per unit. This is especially valuable in older tools where the cost of a new valve may exceed the value of the system itself.

Q: What is the difference between a PV16PKA-B and a PV16PKA-C?
A: The PV16PKA-C typically features an upgraded actuator and improved sealing material. The PV16PKA-B is older and may use EPDM seals, which are less compatible with modern process gases. Always verify compatibility with your specific tool.