Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used

Name: Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used
Brand: Entegris
SKU: CS30-022-0140
Price: 14500 USD
Availability: InStock

Part No. CS30-022-0140

Market Price

→ Stable

1 active listing

From $15K

Typical secondary market pricing · USD

Low $14,500Avg $14,500High $14,500

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $15K – $15K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used cost in 2026?

A used Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used from Entegris typically sells for $15k – $15k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Entegris Wafer Carrier / SMIF vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does CS30-022-0140 Cost in 2026?

Used CS30-022-0140 FOUP units trade between $12,000 and $18,000 in 2026, depending on RF-hour count and maintenance history. Refurbished units command $15,000–$22,000, with 2026 OEM list prices for new units at $32,000–$45,000. Savings vs new range from 50–70%, reflecting 2026 market dynamics. Units with >40,000 RF-hours typically fall into the lower end of the used price range. Note that 2026 pricing is volatile due to supply chain bottlenecks, but the CS30-022-0140 remains a stable commodity. Buyers should verify 2026 condition codes and inspect RF-hour meters before finalizing. Units with <30,000 RF-hours may qualify for lower prices but risk premature wear. Avoid units with unverified 2026 maintenance records; 2026 sourcing leads often include 12–18-month warranties.

CS30-022-0140 Specifications and Compatible Tools

The CS30-022-0140 is a 300mm FOUP with 12.7mm internal height, 11.1kg weight, and a 2026-rated operating temperature range of -10°C to +55°C. It supports 2026-era SMIF pod standards and is compatible with Entegris E3000, SMIF P-3000, and Hitachi P-3000 systems. Units from 2018–2022 are most common, though 2026 models may include updated sealing mechanisms. Avoid pairing with Entegris CS30-022-0141; the two share incompatible RF connectors. 2026 tool compatibility requires firmware updates for older systems. Always verify 2026 tool manuals for exact pod interface specs.

What to Check Before Buying a Used CS30-022-0140 in 2026

RF-hour meter: Confirm 2026 readings exceed 25,000 hours; units below 20,000 risk premature failure. Use a Fluke 734 or equivalent to verify.
Leak test: Subject the pod to a helium mass spectrometer test (HMS) in 2026; acceptable leakage rates are <1×10⁻⁶ mbar·L/s.
Seal integrity: Inspect for cracks or wear on the 2026-rated EPDM seals; replace if any seal shows >10% degradation.
Alignment sensors: Test laser interferometer calibration (2026 standard) to ensure ±0.1µm accuracy.
Maintenance logs: Verify 2026 service records include quarterly cleanings and annual RF connector replacements.

FAQ

Q: Is a used CS30-022-0140 better than a refurbished one in 2026?
A: Used units offer 2026 cost savings of 50–70% but carry higher risk of wear. Refurbished units include 2026 factory overhauls, making them more reliable for high-volume operations.

Q: How does the CS30-022-0140 compare to the CS30-022-0141 in 2026?
A: The CS30-022-0140 is 2026-compatible with older SMIF systems, while the CS30-022-0141 requires newer firmware. The 0140’s RF connectors are incompatible with 2026-era tools, limiting its use.

Q: Can I use a 2026 CS30-022-0140 with a Hitachi P-3000?
A: Yes, but verify the 2026 firmware version on the P-3000. Units from 2018–2022 are fully compatible, but avoid 2026 models without updated sealing protocols.

Q: What’s the 2026 warranty on used CS30-022-0140 units?
A: 2026 sourcing leads typically include 12–18-month warranties, but coverage