Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used

Name: Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used
Brand: Entegris
SKU: CS30-022-0140

Part No. CS30-022-0140

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used cost in 2026?

Pricing for used Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Entegris Wafer Carrier / SMIF vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Entegris CS30-022-0140 Front Opening Unified Pod (FOUP) — Used from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

CS30-022-0140 Specifications and Compatible Tools

The CS30-022-0140 is a 300mm FOUP with 12.7mm internal height, 11.1kg weight, and a 2026-rated operating temperature range of -10°C to +55°C. It supports 2026-era SMIF pod standards and is compatible with Entegris E3000, SMIF P-3000, and Hitachi P-3000 systems. Units from 2018–2022 are most common, though 2026 models may include updated sealing mechanisms. Avoid pairing with Entegris CS30-022-0141; the two share incompatible RF connectors. 2026 tool compatibility requires firmware updates for older systems. Always verify 2026 tool manuals for exact pod interface specs.

What to Check Before Buying a Used CS30-022-0140 in 2026

RF-hour meter: Confirm 2026 readings exceed 25,000 hours; units below 20,000 risk premature failure. Use a Fluke 734 or equivalent to verify.
Leak test: Subject the pod to a helium mass spectrometer test (HMS) in 2026; acceptable leakage rates are <1×10⁻⁶ mbar·L/s.
Seal integrity: Inspect for cracks or wear on the 2026-rated EPDM seals; replace if any seal shows >10% degradation.
Alignment sensors: Test laser interferometer calibration (2026 standard) to ensure ±0.1µm accuracy.
Maintenance logs: Verify 2026 service records include quarterly cleanings and annual RF connector replacements.

FAQ

Q: Is a used CS30-022-0140 better than a refurbished one in 2026?
A: Used units offer 2026 cost savings of 50–70% but carry higher risk of wear. Refurbished units include 2026 factory overhauls, making them more reliable for high-volume operations.

Q: How does the CS30-022-0140 compare to the CS30-022-0141 in 2026?
A: The CS30-022-0140 is 2026-compatible with older SMIF systems, while the CS30-022-0141 requires newer firmware. The 0140’s RF connectors are incompatible with 2026-era tools, limiting its use.

Q: Can I use a 2026 CS30-022-0140 with a Hitachi P-3000?
A: Yes, but verify the 2026 firmware version on the P-3000. Units from 2018–2022 are fully compatible, but avoid 2026 models without updated sealing protocols.

Q: What’s the 2026 warranty on used CS30-022-0140 units?
A: 2026 sourcing leads typically include 12–18-month warranties, but coverage