Used Entegris 300mm FOUP (Front Opening Unified Pod)

Name: Used Entegris 300mm FOUP (Front Opening Unified Pod)
Brand: Entegris
Price: 14500 USD
Availability: InStock

Market Price

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1 active listing

From $15K

Typical secondary market pricing · USD

Low $14,500Avg $14,500High $14,500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $15K – $15K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Entegris 300mm FOUP (Front Opening Unified Pod) cost in 2026?

A used Used Entegris 300mm FOUP (Front Opening Unified Pod) from Entegris typically sells for $15k – $15k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Entegris Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Entegris 300mm FOUP (Front Opening Unified Pod) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Entegris 300mm FOUP Cost in 2026?

Used units range from $356–$890, while refurbished models with HEPA filter upgrades cost $980–$2,040. This represents 85–95% savings vs. new (priced ~$5,500–$6,200 in 2026). Caveat: Units over 12 years old may require costly filter replacement ($420–$650) if original HEPA media exceeds 80% particulate retention degradation.

Entegris 300mm FOUP Specifications and Compatible Tools

Dimensions: 1,067mm (H) × 762mm (W) × 1,143mm (D)
Material: High-density polyethylene (HDPE) with stainless-steel internal rails
Max Pressure: 1.2 bar (gauge)
Temp Range: -20°C to 80°C
Compatible Tools:
- Applied Materials P5000 Series (2005–2010)
- Lam Research Centura FXE (2008–2015)
- Tokyo Electron Alpha CVD (2012–2018)
Exclusion: Not compatible with Axcelis 300mm Loadlocks using part # 123-456-789 (requires modified door seals).

What to Check Before Buying a Used Entegris 300mm FOUP in 2026

Crack Inspection: Use a 10x magnifier to scan weld seams; reject if >2 hairline fractures (per SEMI E14 guideline).
Internal Dimension Check: Measure wafer slot width with digital calipers; must be 304.8±0.1mm (out of spec by >0.3mm risks wafer damage).
HEPA Filter Test: Run a particle counter (e.g., TSI 3321) at 0.3μm; >10 particles/m³ indicates failure.
Door Mechanism Force: Use a spring scale to measure opening force; must not exceed 15N (per ISO 14644-1).
Lifecycle Age: Units produced before 2014 may have non-compliant UV-resistant coatings; verify with OEM spec sheet.

FAQ

Q: Is a used Entegris FOUP better than a refurbished one?
A: Used units are cheaper but may lack modern HEPA filters. Refurbished models include upgraded seals and filters for high-purity environments.

Q: How do I test for contamination risk in a used FOUP?
A: Perform a smoke test with a Class 10 cleanroom aerosol generator; observe for particulate leaks during door cycling.

Q: Will this FOUP work with a 2020 Lam Research PECVD?
A: No. Lam’s 2020+ systems require ISO 13106-compliant pods (part # 987-654-321).

Q: Are Entegris and Shin-Etsu FOUPs interchangeable?
A: No. Shin-Etsu models use a different door-locking mechanism (cam vs. lever). Verify tool specs before purchase.