Used Entegris FOUP / Wafer Carrier

Name: Used Entegris FOUP / Wafer Carrier
Brand: Entegris
Price: 14500 USD
Availability: InStock

Market Price

→ Stable

1 active listing

From $15K

Typical secondary market pricing · USD

Low $14,500Avg $14,500High $14,500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $15K – $15K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Entegris FOUP / Wafer Carrier cost in 2026?

A used Used Entegris FOUP / Wafer Carrier from Entegris typically sells for $15k – $15k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Entegris Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Entegris FOUP / Wafer Carrier from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Entegris FOUP / Wafer Carrier Cost in 2026?

Used units: $250–$1,600 (varies by cycle count and surface integrity). Refurbished: $400–$2,000 (includes HEPA filter replacement and particle count calibration). New OEM price remains ~$3,500. Used parts save 88–92% vs new. Caveat: Reject units with >500 µm-depth scratches on load-lock doors—these breach Class 10 cleanroom standards. Particle counts above 500 particles/m³ (0.5 µm) disqualify for advanced node use.

Entegris FOUP / Wafer Carrier Specifications and Compatible Tools

Wafer size: 300mm
Material: High-purity polypropylene (ISO 14644-1 Class 10)
Max pressure: 100 kPa (vented for tool integration)
Temp range: -50°C to 150°C
Compatible tools:
- Applied Materials P5000 (2010–2015)
- Lam Research Centura DXZ (2008–2014)
- Tokyo Electron Alpha CVD (2012–2017)
  Exclusion: Not compatible with Axcelis S Series (part # AS-FOUP-2003) due to non-matching door actuation pins. Verify with tool I/O port dimensions before installation.