Used Aluminum Nitride (AlN) Electrostatic Chuck

Name: Used Aluminum Nitride (AlN) Electrostatic Chuck
Brand: Various (AMAT, Lam, Kyocera)
Price: 20000 USD
Availability: InStock

Market Price

→ Stable

$5K–$35K

Typical secondary market pricing · USD

Low $5,000Avg $20,000High $35,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $5K – $35K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Aluminum Nitride (AlN) Electrostatic Chuck cost in 2026?

A used Used Aluminum Nitride (AlN) Electrostatic Chuck from Various (AMAT, Lam, Kyocera) typically sells for $5k – $35k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (AMAT, Lam, Kyocera) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Aluminum Nitride (AlN) Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Aluminum Nitride (AlN) Electrostatic Chuck Cost in 2026?

Used AlN ESCs (part numbers 797-000234-A, 550-34567-01) will range from $8,500 to $28,000 in 2026, depending on OEM and condition. Refurbished units (certified by AMAT or Lam) will cost $12,000–$32,000, saving buyers 40–65% compared to new ($20,000–$50,000 MSRP). Savings drop to 20% for pre-2018 Kyocera models due to higher demand. Caveat: Units with thermal conductivity below 175 W/m·K (tested via laser flash analysis) will fail CVD tool specs and require costly recoating.

AlN Electrostatic Chuck Specifications and Compatible Tools

Key specs: Thermal conductivity 170–220 W/m·K, max voltage 10 kV DC, operating temp -50°C to 450°C, and wafer size 150–300 mm. Compatible with:

AMAT Centura XE (2012–2018)
Lam P5 Etch (2015–2020)
Kyocera KSE-3000 (2014–2019)
Exclusion: Do not install in Lam P5i tools with part number 797-000234-B—older ESCs lack the 50-µm thick AlN coating required for plasma stability. Verify tool I/O port dimensions (12.7 mm vs. 15.87 mm variants).

What to Check Before Buying a Used AlN Electrostatic Chuck in 2026

Thermal conductivity: Use a laser flash analyzer; reject if <175 W/m·K.
Voltage retention: Apply 8 kV DC for 10 mins; leakage >5 µA fails (test with Fluke 884