Used Aluminum Nitride (AlN) Electrostatic Chuck

Name: Used Aluminum Nitride (AlN) Electrostatic Chuck
Brand: Various (AMAT, Lam, Kyocera)

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Aluminum Nitride (AlN) Electrostatic Chuck moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Aluminum Nitride (AlN) Electrostatic Chuck cost in 2026?

Pricing for used Used Aluminum Nitride (AlN) Electrostatic Chuck units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (AMAT, Lam, Kyocera) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Aluminum Nitride (AlN) Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

AlN Electrostatic Chuck Specifications and Compatible Tools

Key specs: Thermal conductivity 170–220 W/m·K, max voltage 10 kV DC, operating temp -50°C to 450°C, and wafer size 150–300 mm. Compatible with:

AMAT Centura XE (2012–2018)
Lam P5 Etch (2015–2020)
Kyocera KSE-3000 (2014–2019)
Exclusion: Do not install in Lam P5i tools with part number 797-000234-B—older ESCs lack the 50-µm thick AlN coating required for plasma stability. Verify tool I/O port dimensions (12.7 mm vs. 15.87 mm variants).

What to Check Before Buying a Used AlN Electrostatic Chuck in 2026

Thermal conductivity: Use a laser flash analyzer; reject if <175 W/m·K.
Voltage retention: Apply 8 kV DC for 10 mins; leakage >5 µA fails (test with Fluke 884