Used Brooks Automation Wafer Handling Robot

Name: Used Brooks Automation Wafer Handling Robot
Brand: Brooks Automation

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Brooks Automation Wafer Handling Robot moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Brooks Automation Wafer Handling Robot cost in 2026?

Pricing for used Used Brooks Automation Wafer Handling Robot units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Brooks Automation Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks Automation Wafer Handling Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Brooks Automation Wafer Handling Robot Specifications and Compatible Tools

Key specs: 1.2–1.5 kW power draw, 0.1 µm positioning accuracy, 1×10⁻⁶ Torr vacuum compatibility, and 300mm wafer payload. Compatible with:

Applied Materials Centura® (models 5500/6500, 1998–2005)
Lam Research Endura® (models 5500/7500, 2000–2007)
Tokyo Electron Lambda® (models DP-800/DP-900, 2002–2009)

What to Check Before Buying a Used Brooks Automation Wafer Handling Robot in 2026

Motor encoder resolution: Use a digital multimeter to measure step pulses; <0.1 µm repeatability indicates degraded servos.
End-effector wear: Measure vacuum chuck flatness with a laser interferometer; >5 µm deviation invalidates ISO 2880 compliance.
Vacuum seal integrity: Perform a helium leak test at 1×10⁻⁵ Torr; >1×10⁻⁶ Torr/s leakage requires seal replacement.
Cycle count: Access Brooks’ firmware log (requires ModelView™ software); units >2.5 million cycles risk bearing failure.
Controller firmware: Ensure version 3.2+ supports 300mm wafer protocols; older versions lack anti-contamination algorithms.

FAQ

Q: Used vs. refurbished Brooks robot—what’s the difference?
A: Used units are operational but may have untested internal wear; refurbished includes replaced servos, seals, and OEM firmware calibration.