Used Brooks Automation Wafer Handling Robot

Name: Used Brooks Automation Wafer Handling Robot
Brand: Brooks Automation
Price: 18180 USD
Availability: InStock

Market Price

→ Stable

$11K–$25K

Typical secondary market pricing · USD

Low $11,210Avg $18,180High $25,150

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $11K – $25K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Brooks Automation Wafer Handling Robot cost in 2026?

A used Used Brooks Automation Wafer Handling Robot from Brooks Automation typically sells for $11k – $25k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Brooks Automation Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks Automation Wafer Handling Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Brooks Automation Wafer Handling Robot Cost in 2026?

Used units (Brooks model 8900-SL) range from $11,210–$18,000, while refurbished variants (with OEM-certified rebuilds) cost $16,500–$25,150. New units from Brooks Automation remain above $50,000, offering ~75% savings for used and ~68% savings for refurbished options. Caveat: Robots with >2 million operational cycles (trackable via Brooks’ CycleLog™ firmware) may incur 15–20% higher repair costs due to wear on linear actuators. Market demand for 300mm wafer compatibility (ISO standard 2880) drives price premiums for units with dual-axis servo motors.

Brooks Automation Wafer Handling Robot Specifications and Compatible Tools

Key specs: 1.2–1.5 kW power draw, 0.1 µm positioning accuracy, 1×10⁻⁶ Torr vacuum compatibility, and 300mm wafer payload. Compatible with:

Applied Materials Centura® (models 5500/6500, 1998–2005)
Lam Research Endura® (models 5500/7500, 2000–2007)
Tokyo Electron Lambda® (models DP-800/DP-900, 2002–2009)
Exclusion warning: Do not install on Veeco Nexus 300 (part #VN-300-ROB) without a $3,200 adapter kit—Brooks’ pneumatic interface lacks the 48-pin I/O required for closed-loop control. Verify tool’s vacuum pump specs to match the robot’s 15 L/min flow rate.

What to Check Before Buying a Used Brooks Automation Wafer Handling Robot in 2026

Motor encoder resolution: Use a digital multimeter to measure step pulses; <0.1 µm repeatability indicates degraded servos.
End-effector wear: Measure vacuum chuck flatness with a laser interferometer; >5 µm deviation invalidates ISO 2880 compliance.
Vacuum seal integrity: Perform a helium leak test at 1×10⁻⁵ Torr; >1×10⁻⁶ Torr/s leakage requires seal replacement.
Cycle count: Access Brooks’ firmware log (requires ModelView™ software); units >2.5 million cycles risk bearing failure.
Controller firmware: Ensure version 3.2+ supports 300mm wafer protocols; older versions lack anti-contamination algorithms.

FAQ

Q: Used vs. refurbished Brooks robot—what’s the difference?
A: Used units are operational but may have untested internal wear; refurbished includes replaced servos, seals, and OEM firmware calibration.

Q: Can this robot handle 200mm wafers?
A: Yes, but 300mm models require a $1,800 tooling swap