Various (AMAT, Lam, Watanabe)
Used Ceramic Electrostatic Chuck
Various (AMAT, Lam, Watanabe)
Used Ceramic Electrostatic Chuck
Market Price
Request Quote — No current market data
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Ceramic Electrostatic Chuck moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Ceramic Electrostatic Chuck cost in 2026?
Pricing for used Used Ceramic Electrostatic Chuck units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (AMAT, Lam, Watanabe) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Ceramic Electrostatic Chuck from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Ceramic Electrostatic Chuck Specifications and Compatible Tools
Key specs: 10 kV DC voltage rating, 300 mm wafer footprint, 500 W max power draw, and thermal expansion coefficient <4.5×10⁻⁶/°C. Compatible with:
- AMAT Centura platforms (models 5500/6500, 2012–2017 production)
- Lam P5 etch tools (models 5200i/5500i, 2014–2018)
- Watanabe WES-300 series (models A3/B5, 2010–2016)
Exclusion warning: Do not install on Axcelis 300 mm implant tools (part number IM-300X-ESC) without modifying the grounding circuit—these require metallic chucks per OEM specs.
What to Check Before Buying a Used Ceramic Electrostatic Chuck in 2026
- Ceramic integrity: Use a 5× magnifier to inspect for microcracks; reject if >3 cracks exist or any exceed 0.2 mm in length.
- Voltage retention: Test with a high-voltage multimeter (Fluke HVM100); must hold ≥9 kV DC without arcing.
- Thermal conductivity: Measure with a laser flash analyzer; values below 2.0 W/m·K indicate degradation.
- Cycle count: Request PLC logs; replace if >15,000 wafer cycles (typical lifespan is 10–12k cycles).
- Surface flatness: Use a profilometer; deviation >5 microns from ISO 25178 standards invalidates precision specs.
FAQ
Q: Used vs. refurbished ceramic ESC—what’s the difference?
A: Used units are functional as-is; refurbished includes ceramic resurfacing and voltage system recalibration. Refurbished parts often carry 6–12 month warranties.
Q: Can a 300 mm ceramic ESC work in a 200 mm tool?
A: Yes, but requires adapter rings and power supply adjustments. Confirm tool’s max voltage compatibility (8–10 kV).
Q: How to test for electrostatic hold force?
A: Use a tensiometer with 5 N precision; hold force must exceed 15 N/cm² at 8 kV.
Recent Market Listings
Updated Sep 30No recent market activity for Used Ceramic Electrostatic Chuck.
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