Used Edwards Dry Vacuum Pump

Name: Used Edwards Dry Vacuum Pump
Brand: Edwards

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Edwards Dry Vacuum Pump moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Edwards Dry Vacuum Pump cost in 2026?

Pricing for used Used Edwards Dry Vacuum Pump units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Edwards Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Edwards Dry Vacuum Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Edwards Dry Vacuum Pump Specifications and Compatible Tools

Key specs: pumping speed 300–500 l/s, ultimate pressure 10⁻³ Torr, power draw 15–25 kW, voltage 480V 3-phase, frequency 60Hz. Compatible with:

Applied Materials Centura (1998–2005)
Lam Research Endura (2000–2007)
ASMI Fusion (2002–2009)
Tokyo Electron Lambda (2003–2010)
Exclusion: Not compatible with Edwards EDP-2200X (oil-based variants—check part number suffix).

What to Check Before Buying a Used Edwards Dry Vacuum Pump in 2026

Rotor wear: Measure clearance with a dial gauge; >0.1mm indicates excessive wear.
Seal integrity: Inspect labyrinth seals for cracks or debris buildup using a borescope.
Motor insulation resistance: Test with a megohmmeter; <10MΩ at 500VDC rejects the unit.
Vacuum decay rate: Run a 10-minute hold test; >5% pressure rise invalidates performance.
Service history: Verify rebuild records (pumps >7 years old without recent overhaul risk rotor failure).

FAQ

Q: How much does a used Edwards dry pump save vs new in 2026?
A:

Q: Used vs refurbished Edwards pump—what’s the difference?
A: Refurbished includes new seals, bearings, and motor windings; used may require post-purchase repairs.

Q: Can I install this on a 2012 Lam Research tool?
A: Yes, but confirm the tool’s vacuum port configuration (Model Endura 5500 requires adapter plate P/N 890-4432).

Q: How to test the pump after installation?
A: Run a 24-hour continuous cycle, monitor temperature rise (<40°C above ambient), and log pressure stability every 30 minutes.