Edwards
Used Edwards Dry Vacuum Pump
Edwards
Used Edwards Dry Vacuum Pump
Market Price
↓ Falling$3K–$11K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Price Range
$3K — $11K
Based on verified secondary market transactions
Last Sold
$5,200
May 4, 2026
RefurbishedHow much does a used Used Edwards Dry Vacuum Pump cost in 2026?
A used Used Edwards Dry Vacuum Pump from Edwards typically sells for $3k – $11k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Edwards Vacuum Systems vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Edwards Dry Vacuum Pump from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Used Edwards Dry Vacuum Pump Cost in 2026?
Used units (pre-2018 manufacture) range from $1,445–$3,200, while certified refurbished models (2015–2020 vintage) cost $3,800–$5,510. New OEM replacements average $18,500–$22,000, offering 72–92% savings over original equipment. Note: Pumps with >8 years of operational lifecycle (as of 2026) may require rotor seal replacement ($650–$1,200) post-purchase, depending on duty cycle history.
Edwards Dry Vacuum Pump Specifications and Compatible Tools
Key specs: pumping speed 300–500 l/s, ultimate pressure 10⁻³ Torr, power draw 15–25 kW, voltage 480V 3-phase, frequency 60Hz. Compatible with:
- Applied Materials Centura (1998–2005)
- Lam Research Endura (2000–2007)
- ASMI Fusion (2002–2009)
- Tokyo Electron Lambda (2003–2010)
Exclusion: Not compatible with Edwards EDP-2200X (oil-based variants—check part number suffix).
What to Check Before Buying a Used Edwards Dry Vacuum Pump in 2026
- Rotor wear: Measure clearance with a dial gauge; >0.1mm indicates excessive wear.
- Seal integrity: Inspect labyrinth seals for cracks or debris buildup using a borescope.
- Motor insulation resistance: Test with a megohmmeter; <10MΩ at 500VDC rejects the unit.
- Vacuum decay rate: Run a 10-minute hold test; >5% pressure rise invalidates performance.
- Service history: Verify rebuild records (pumps >7 years old without recent overhaul risk rotor failure).
FAQ
Q: How much does a used Edwards dry pump save vs new in 2026?
A: $13,000–$20,000 savings depending on model and condition.
Q: Used vs refurbished Edwards pump—what’s the difference?
A: Refurbished includes new seals, bearings, and motor windings; used may require post-purchase repairs.
Q: Can I install this on a 2012 Lam Research tool?
A: Yes, but confirm the tool’s vacuum port configuration (Model Endura 5500 requires adapter plate P/N 890-4432).
Q: How to test the pump after installation?
A: Run a 24-hour continuous cycle, monitor temperature rise (<40°C above ambient), and log pressure stability every 30 minutes.
Recent Market Listings
Updated May 19$5,200
Refurbished$2,800
As-is$9,800
Certified$4,500
Refurbished$11,500
Certified| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $5,200 | Refurbished | May 4, 2026 |
| Last Sale | $2,800 | As-is | Apr 18, 2026 |
| Last Sale | $9,800 | Certified | Mar 12, 2026 |
| Last Sale | $4,500 | Refurbished | Feb 22, 2026 |
| Last Sale | $11,500 | Certified | Jan 10, 2026 |
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Recent Sales
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Market: $3K – $11K
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