Used Edwards Turbo Molecular Pump

Name: Used Edwards Turbo Molecular Pump
Brand: Edwards

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Edwards Turbo Molecular Pump moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Edwards Turbo Molecular Pump cost in 2026?

Pricing for used Used Edwards Turbo Molecular Pump units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Edwards Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Edwards Turbo Molecular Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Edwards Turbo Molecular Pump Specifications and Compatible Tools

Key specs: base pressure 1e-10 Torr, pumping speed 300–1,200 l/s, power draw 1.5–3.2 kW, voltage 208–480V 3-phase, rotor speed 9,000–45,000 RPM. Compatible with:

AMAT Centura 5500 (1998–2005)
Lam Research P5i (2001–2010)
Applied Materials Endura P5 (1999–2012)
Exclusion: Not compatible with Axcelis 8800 (part #774-3322) due to incompatible ISO 30 flange orientation. Verify tool’s required forepump interface (Edwards NMP 300 series requires a 2-inch gate valve).

What to Check Before Buying a Used Edwards Turbo Molecular Pump in 2026

Rotor runout: Use a dial indicator; deviation >0.05mm indicates bearing wear.
Pump-down time: Measure from atmospheric to 1e-3 Torr; >30 minutes rejects 70% of pre-2010 units.
Bearing health: Vibration analysis (0–65kHz spectrum) must show <0.15mm/sec RMS.
Oil contamination: Check for >50ppm water via Karl Fischer titration; reject if oil has not been changed in 5+ years.
Rotor balance: Use a soft-bearing balancer; >0.5g imbalance voids most warranties.

FAQ

Q: Used vs. refurbished Edwards TMP: which is better for high-throughput etch tools?
A: Refurbished units (2015–2020) with ceramic bearings are 40% more reliable in >8-hour cycles. Used pre-2012 models require more frequent rotor replacements.

Q: Can I install an Edwards TMP on a tool designed for Varian?
A: Yes, if flange (ISO 63 or ISO 100) and power specs match. Check forepump compatibility; Varian tools often use 208V vs. Edwards’ 4