✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Edwards

Used Edwards Turbo Molecular Pump

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Edwards

Used Edwards Turbo Molecular Pump

Name: Used Edwards Turbo Molecular Pump
Brand: Edwards
Price: 3478 USD
Availability: InStock

Market Price

↑ Rising

3 active listings

$1K–$6K

Typical secondary market pricing · USD

Low $1,445Avg $3,478High $5,510

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $1K – $6K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market DataEdwards Turbopump

Trending Up

Price Range

$1K — $6K

Based on verified secondary market transactions

Last Sold

$3,200

May 2, 2026

Refurbished

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How much does a used Used Edwards Turbo Molecular Pump cost in 2026?

A used Used Edwards Turbo Molecular Pump from Edwards typically sells for $1k – $6k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Edwards Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Edwards Turbo Molecular Pump from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Edwards Turbo Molecular Pump Cost in 2026?

Used units (pre-2018 manufacture) range from $1,445–$3,200, while refurbished models (2015–2020 vintage) cost $3,500–$5,510. Refurbished variants save 63–79% vs. new ($12k–$15k). Savings drop to 15–30% for units with >10,000 operational hours or post-2012 models due to ceramic bearing upgrades. Always verify base pressure specs: pumps with <1e-8 Torr performance command a 20–35% premium in 2026 markets.

Edwards Turbo Molecular Pump Specifications and Compatible Tools

Key specs: base pressure 1e-10 Torr, pumping speed 300–1,200 l/s, power draw 1.5–3.2 kW, voltage 208–480V 3-phase, rotor speed 9,000–45,000 RPM. Compatible with:

AMAT Centura 5500 (1998–2005)
Lam Research P5i (2001–2010)
Applied Materials Endura P5 (1999–2012)
Exclusion: Not compatible with Axcelis 8800 (part #774-3322) due to incompatible ISO 30 flange orientation. Verify tool’s required forepump interface (Edwards NMP 300 series requires a 2-inch gate valve).

What to Check Before Buying a Used Edwards Turbo Molecular Pump in 2026

Rotor runout: Use a dial indicator; deviation >0.05mm indicates bearing wear.
Pump-down time: Measure from atmospheric to 1e-3 Torr; >30 minutes rejects 70% of pre-2010 units.
Bearing health: Vibration analysis (0–65kHz spectrum) must show <0.15mm/sec RMS.
Oil contamination: Check for >50ppm water via Karl Fischer titration; reject if oil has not been changed in 5+ years.
Rotor balance: Use a soft-bearing balancer; >0.5g imbalance voids most warranties.

FAQ

Q: Used vs. refurbished Edwards TMP: which is better for high-throughput etch tools?
A: Refurbished units (2015–2020) with ceramic bearings are 40% more reliable in >8-hour cycles. Used pre-2012 models require more frequent rotor replacements.

Q: Can I install an Edwards TMP on a tool designed for Varian?
A: Yes, if flange (ISO 63 or ISO 100) and power specs match. Check forepump compatibility; Varian tools often use 208V vs. Edwards’ 4