Various (SGL Carbon, Tokai Carbon, Poco Graphite)
Used Epitaxy Susceptor for Epi Reactor
Various (SGL Carbon, Tokai Carbon, Poco Graphite)
Used Epitaxy Susceptor for Epi Reactor
Market Price
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Request Quote →Last verified: 2026-05-16
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Epitaxy Susceptor for Epi Reactor moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Epitaxy Susceptor for Epi Reactor cost in 2026?
Pricing for used Used Epitaxy Susceptor for Epi Reactor units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (SGL Carbon, Tokai Carbon, Poco Graphite) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Epitaxy Susceptor for Epi Reactor from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Epitaxy Susceptor Specifications and Compatible Tools
| Parameter | Typical Values |
|---|---|
| Material | ISO-molded graphite, SiC-coated or PyC-coated |
| Wafer size | 150mm, 200mm, 300mm |
| Temperature rating | Up to 1,250°C (Si epi); up to 1,650°C (SiC epi) |
| Flatness tolerance | ±0.1mm across pocket |
| Coating thickness | 50–200μm SiC or PyC |
| Purity | <5 ppm metallic impurities (SEMI-grade graphite) |
Compatible tools: Applied Materials Centura Epi (200mm, 300mm), ASM Epsilon 2000/3200 (200mm/300mm), Aixtron CCS (150–200mm), Veeco TurboDisc K465i (150–200mm GaN). Compatibility warning: ASM Epsilon 2000 susceptors are NOT compatible with Epsilon 3200 systems — the pocket geometry and rotation pin locations differ. Part numbers EP2000-SUSC vs. EP3200-SUSC must match exactly.
What to Check Before Buying a Used Epitaxy Susceptor in 2026
- Pocket surface flatness: Measure with a laser profilometer or optical flat. Wafer-seating pocket must be flat to ±0.1mm; warped pockets cause non-uniform temperature distribution and epi thickness variation of >2%.
- Cycle count verification: Request the process history or wafer run log. Susceptors from 2010–2020 production runs in Si epi tools average 50–150 run cycles/year. Above 200 cumulative cycles, request a weight-loss measurement — graphite loss >3% from original weight indicates erosion.
- Contamination check: TXRF or SIMS analysis for metallic contamination >10 ppb Fe, Ni, or Cr disqualifies a susceptor for device-grade wafers. Ask for the last characterization report.
- Dimensional verification: Compare OD, ID, and pocket depth against OEM drawing. Graphite creep at high temperature can cause >0.5mm dimensional drift after 100+ cycles; measure before assuming fitment.
Frequently Asked Questions
How many runs can I expect from a used epitaxy susceptor? A well-maintained used susceptor typically delivers 50–150 additional runs from purchase, depending on coating condition and process chemistry. SiC epi applications are far more aggressive than Si epi — expect 30–60 runs before recoating vs. 100–200 for Si epi.
SGL Carbon vs. Tokai Carbon susceptors — is there a meaningful difference? Both supply SEMI-grade graphite with comparable purity (<5 ppm metals). SGL Carbon's EK10 grade is favored for high-temperature SiC epi; Tokai's G347 grades are standard in Si epi Centura tools. For used parts, match the OEM's specified grade on the BOM — don't substitute.
Can I recoat a used susceptor instead of buying new? Typically cost-effective if the core is sound and within dimensional tolerance.
What epi tools are hardest to source susceptors for? Aixtron CCS and Veeco TurboDisc susceptors are the hardest to find used — low installed base means limited secondary market supply. Lead times for used units can reach 6–8 weeks. Centura Epi susceptors are the most liquid, with consistent secondary market availability.
Last updated: May 2026. Pricing reflects current 2026 secondary market conditions. Request a quote for current availability.
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