Various (Entegris, Shin-Etsu)
Used FOUP / Wafer Pod (300mm)
Various (Entegris, Shin-Etsu)
Used FOUP / Wafer Pod (300mm)
Market Price
↓ Falling$356–$2K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Price Range
$356 — $2K
Based on verified secondary market transactions
Last Sold
$850
May 9, 2026
RefurbishedHow much does a used Used FOUP / Wafer Pod (300mm) cost in 2026?
A used Used FOUP / Wafer Pod (300mm) from Various (Entegris, Shin-Etsu) typically sells for $356 – $2k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various (Entegris, Shin-Etsu) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used FOUP / Wafer Pod (300mm) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used FOUP/Wafer Pod (300mm) Cost in 2026?
Used FOUPs (300mm) priced between $200–$1,200 in 2026, depending on OEM and condition. Refurbished units range from $800–$1,500, with Entegris models commanding a 15–20% premium over Shin-Etsu. Savings vs new: 85–90% (new FOUPs exceed $5,000–$8,000). Caveat: Particles ≥0.5μm must remain <10 per cubic foot (per SEMI S23-0601); used pods with >50 particles/ft³ require $200–$300 requalification. Price variance also hinges on door-seal integrity—cracked or degraded seals add $150–$250 to repair costs.
FOUP/Wafer Pod (300mm) Specifications and Compatible Tools
Key specs: 1,100 x 700 x 350 mm (LxWxH), polypropylene construction, Class 10 cleanroom compliance, and 2.5–3.0 mm thick door seals. Compatible with:
- Applied Materials Centura (2008–2015)
- Lam Research P5 (2010–2017)
- Tokyo Electron Alpha (2012–2019)
- ASML NXT:1700 (2016–2021)
Exclusion: Not compatible with Hitachi HI-400 (1998–2005) due to legacy SEMI E154 port mismatch. Verify tool’s SEMI S23-0601 compliance before purchase.
What to Check Before Buying a Used FOUP in 2026
- Particle count: Use a laser particle counter (e.g., TSI 3321) to confirm <10 particles ≥0.5μm/ft³. Reject if >50.
- **Door-seal
Recent Market Listings
Updated May 19$850
Refurbished$180
As-is$1,800
Certified$620
Refurbished$2,200
Certified| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $850 | Refurbished | May 9, 2026 |
| Last Sale | $180 | As-is | May 1, 2026 |
| Last Sale | $1,800 | Certified | Apr 5, 2026 |
| Last Sale | $620 | Refurbished | Mar 12, 2026 |
| Last Sale | $2,200 | Certified | Feb 2, 2026 |
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Quick Info
Get a Quote
Market: $356 – $2K
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
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