Various (Entegris, Pall)
Used Gas Purifier for Semiconductor Process Gas
Various (Entegris, Pall)
Used Gas Purifier for Semiconductor Process Gas
Market Price
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Request Quote →Last verified: 2026-05-11
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Gas Purifier for Semiconductor Process Gas moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Gas Purifier for Semiconductor Process Gas cost in 2026?
Pricing for used Used Gas Purifier for Semiconductor Process Gas units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (Entegris, Pall) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Gas Purifier for Semiconductor Process Gas from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Gas Purifier Specifications and Compatible Tools
Key specs: 0.001 µm particle retention, 5–50 SCCM flow rate, 5–25 psi pressure drop, and compatibility with NF3, SF6, and NH3. Works with Applied Materials Centura (2010–2015), Lam Research Endura (2012–2017), and ASMI Fusion (2014–2019). Exclusion: Not compatible with Lam 2300 Exion (2008) due to incompatible pressure regulation (max 15 psi vs. Exion’s 30 psi requirement). Verify I/O port dimensions (NPT ¼” vs. ⅜”) before installation.
What to Check Before Buying a Used Gas Purifier in 2026
- Pressure drop test: Use a digital pressure gauge; reject units with >1.5 psi differential at rated flow (spec: ≤1.0 psi).
- Media inspection: Discoloration (brown/reddish hues) indicates >80% media saturation; replace if operational age exceeds 5 years.
- Flow calibration: Test with a mass flow meter; deviation >5% from rated SCCM invalidates performance.
- O-ring integrity: Check for cracks or hardening (use a 500g force tensile test; failure = reject).
- Lifecycle data: Units with >7 years of use since last media replacement risk 30%+ efficiency loss; verify maintenance logs.
FAQ
Q: Used vs. refurbished gas purifier — which is better?
A: Choose refurbished for >3 years of remaining lifecycle.
Q: How to test a gas purifier’s adsorbent capacity?
A: Perform a breakthrough curve test with CO2 tracer gas. Efficiency <90% at 10-minute retention time requires media
Recent Market Listings
Updated Sep 30No recent market activity for Used Gas Purifier for Semiconductor Process Gas.
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