Used Argon (Ar) Mass Flow Controller

Name: Used Argon (Ar) Mass Flow Controller
Brand: Various (MKS, Brooks, Horiba)

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Argon (Ar) Mass Flow Controller moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

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How much does a used Used Argon (Ar) Mass Flow Controller cost in 2026?

Pricing for used Used Argon (Ar) Mass Flow Controller units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (MKS, Brooks, Horiba) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Lead time: 1-2 weeks

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Argon (Ar) Mass Flow Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 1-2 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Argon MFC Specifications and Compatible Tools

Parameter	MKS 1179A	Brooks SLA5800	Horiba SEC-Z714
FS range (Ar)	10–2,000 sccm	10–10 slm	5–5 slm
Accuracy	±1% FS	±1% FS	±0.5% FS
Repeatability	±0.2% FS	±0.2% FS	±0.1% FS
Response time	<2 sec	<1 sec	<1 sec
Wetted materials	316L SS, Viton	316L SS, EPDM	316L SS, FFKM
Interface	Analog 0–5V	Analog / DeviceNet	Analog / RS-485

Compatible tools: Applied Materials Centura PVD (MKS 1179A standard), Lam Research Versys etch, Novellus Concept One CVD, and TEL Trias. Compatibility warning: MKS 1179A units calibrated for N₂ are NOT equivalent to Ar-calibrated units — conversion factor for Ar vs. N₂ is 1.38, meaning an N₂-cal unit reads 38% low on Ar. Always verify the calibration gas label before installation.

What to Check Before Buying a Used Argon MFC in 2026

Electrical interface check: Verify command/response signals on all pins of the 15-pin D-sub or M12 connector. Corroded pins are common in units from 2003–2010 production; continuity test each pin before installation.
Pressure rating confirmation: Argon supply pressure must match the MFC's max inlet pressure (typically 100 psig for 1179A, 150 psig for SLA5800). Units used in HF or HCl service require FFKM seals — standard Viton seals degrade within 6 months in halogen environments.

Frequently Asked Questions

MKS 1179A vs. Brooks SLA5800 for argon in an etch tool — which is better? Both work, but the SLA5800 wins for low-flow precision below 50 sccm (0.1% FS repeatability vs. 0.2% for 1179A) and is more common in newer 300mm etch tools. The 1179A is the industry standard for legacy 200mm tools and is cheaper to buy, calibrate, and repair. If your tool uses SLA5800 from the OEM, don't substitute an 1179A without verifying the process recipe tolerances.

Can I use any argon MFC or does it have to be OEM-specified? OEM-specified MFCs have validated flow curves for the process recipe. Substituting a different brand requires re-verifying all Ar-flow-dependent process steps. In practice, MKS and Brooks Ar MFCs are interchangeable on most tools if calibrated correctly — but validate with a test run before committing to production wafers.

How often do argon MFCs need recalibration? Every 12–18 months in production, or immediately after any suspected contamination event (e.g., backstream from a pump failure). High-cycle etch processes (>8 hrs/day Ar flow) may shift calibration faster — quarterly verification is best practice.

What's the failure rate on used MFCs? Properly tested used MFCs have a <5% infant mortality rate. The biggest failure mode is valve seat contamination from particulates — most resolvable with an ultrasonic clean. Thermal sensor failures (~15% of older units) are not field-repairable and require a full unit swap.

Last updated: May 2026. Pricing reflects current 2026 secondary market conditions. Request a quote for current availability.