Used MKS/ENI ACE RF Generator

Name: Used MKS/ENI ACE RF Generator
Brand: MKS Instruments (ENI)
Price: 6805 USD
Availability: InStock

Market Price

→ Stable

$4K–$10K

Typical secondary market pricing · USD

Low $3,520Avg $6,805High $10,090

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $4K – $10K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used MKS/ENI ACE RF Generator cost in 2026?

A used Used MKS/ENI ACE RF Generator from MKS Instruments (ENI) typically sells for $4k – $10k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS Instruments (ENI) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS/ENI ACE RF Generator from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does MKS/ENI ACE RF Generator Cost in 2026?

Used units range from $3,520 to $10,090 in 2026, with refurbished models typically priced 15–25% higher than standard used. Refurbished variants include recalibrated power modules and replaced capacitors. Savings vs new (2026 MSRP: $28,500–$34,000) average 40–65%, depending on condition and power rating. Units with <15,000 power cycles and original ENI firmware retain 80–90% of new value. Caveat: Generators with >20% output drift at 1,000W (per IEEE Std 291-2022) require costly recalibration, adding $1,200–$2,500 to total cost.

MKS/ENI ACE RF Generator Specifications and Compatible Tools

Key specs: 1–1,500W output, 13.56 MHz frequency, 208–480V AC input, air/liquid cooling. Power stability: ±0.5% at 500W. Compatible with:

Applied Materials Centura 5500 (2007–2012)
Lam Research P5i Etcher (2009–2014)
Tokyo Electron Pulsar PE-CVD (2005–2010)
Exclusion: Not compatible with MKS N17xL series (2018+) without firmware upgrade (Part #ENI-ACE-FW-2.1). Verify I/O pinout (24-pin vs 32-pin variants) before installation.

What to Check Before Buying a Used MKS/ENI ACE RF Generator in 2026

Power Output Test: Use a Narda 842E wattmeter; ensure 1,000W output is within ±5% of rated value.
Frequency Stability: Measure with a Keysight N9020B spectrum analyzer; drift must stay <1 kHz over 1 hour