Used MKS/ENI ACE RF Generator

Name: Used MKS/ENI ACE RF Generator
Brand: MKS Instruments (ENI)

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used MKS/ENI ACE RF Generator moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used MKS/ENI ACE RF Generator cost in 2026?

Pricing for used Used MKS/ENI ACE RF Generator units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MKS Instruments (ENI) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS/ENI ACE RF Generator from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

MKS/ENI ACE RF Generator Specifications and Compatible Tools

Key specs: 1–1,500W output, 13.56 MHz frequency, 208–480V AC input, air/liquid cooling. Power stability: ±0.5% at 500W. Compatible with:

Applied Materials Centura 5500 (2007–2012)
Lam Research P5i Etcher (2009–2014)
Tokyo Electron Pulsar PE-CVD (2005–2010)
Exclusion: Not compatible with MKS N17xL series (2018+) without firmware upgrade (Part #ENI-ACE-FW-2.1). Verify I/O pinout (24-pin vs 32-pin variants) before installation.

What to Check Before Buying a Used MKS/ENI ACE RF Generator in 2026

Power Output Test: Use a Narda 842E wattmeter; ensure 1,000W output is within ±5% of rated value.
Frequency Stability: Measure with a Keysight N9020B spectrum analyzer; drift must stay <1 kHz over 1 hour