Used MKS/ENI OEM-6 RF Generator

Name: Used MKS/ENI OEM-6 RF Generator
Brand: MKS Instruments (ENI)
Price: 6805 USD
Availability: InStock

Market Price

→ Stable

$4K–$10K

Typical secondary market pricing · USD

Low $3,520Avg $6,805High $10,090

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $4K – $10K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used MKS/ENI OEM-6 RF Generator cost in 2026?

A used Used MKS/ENI OEM-6 RF Generator from MKS Instruments (ENI) typically sells for $4k – $10k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS Instruments (ENI) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS/ENI OEM-6 RF Generator from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used MKS/ENI OEM-6 RF Generator Cost in 2026?

Used units range from $3,520 to $10,090 in 2026, with refurbished models priced 15–20% higher. Refurbished variants include capacitor replacements and full calibration logs. New OEM-6 generators cost ~$25,000, offering 85–90% savings with used options. Caveat: Units with <1.5kW continuous power output at 13.56 MHz are unsuitable for PECVD tools. Verify power stability via a calibrated RF wattmeter before purchase.

MKS/ENI OEM-6 RF Generator Specifications and Compatible Tools

Key specs: 2–6kW output, 13.56 MHz frequency, 208–480VAC input, 50–60Hz line power. Cooling: air-cooled with 0.5CFM airflow requirement. Compatible tools include:

Applied Materials P5000 (2000–2005)
Lam Research Centura P5000 (1998–2003)
Tokyo Electron ULV (2001–2006)
Warning: Not compatible with Lam 7420-00012 (Centura Flex) due to mismatched impedance tuning circuits.

What to Check Before Buying a Used MKS/ENI OEM-6 RF Generator in 2026

Power Output Test: Use a Bird 431E wattmeter to confirm >95% of rated power at 13.56 MHz. Reject units <1.8kW.
Cooling System Inspection: Check for condensation or corrosion in the heatsink; resistance >10Ω between cooling fins indicates blockage.
Capacitor Health: Measure ESR (Equivalent Series Resistance) on all 10µF capacitors; >0.2Ω warrants replacement.
Service History: Units with >3 major repairs since 2020 have 40% higher failure rates.
Frequency Stability: Use a Keysight N9320B analyzer to verify <1% deviation from 13.56 MHz under load.