Used MKS/ENI OEM-6 RF Generator

Name: Used MKS/ENI OEM-6 RF Generator
Brand: MKS Instruments (ENI)

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used MKS/ENI OEM-6 RF Generator moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used MKS/ENI OEM-6 RF Generator cost in 2026?

Pricing for used Used MKS/ENI OEM-6 RF Generator units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MKS Instruments (ENI) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS/ENI OEM-6 RF Generator from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

MKS/ENI OEM-6 RF Generator Specifications and Compatible Tools

Key specs: 2–6kW output, 13.56 MHz frequency, 208–480VAC input, 50–60Hz line power. Cooling: air-cooled with 0.5CFM airflow requirement. Compatible tools include:

Applied Materials P5000 (2000–2005)
Lam Research Centura P5000 (1998–2003)
Tokyo Electron ULV (2001–2006)
Warning: Not compatible with Lam 7420-00012 (Centura Flex) due to mismatched impedance tuning circuits.

What to Check Before Buying a Used MKS/ENI OEM-6 RF Generator in 2026

Power Output Test: Use a Bird 431E wattmeter to confirm >95% of rated power at 13.56 MHz. Reject units <1.8kW.
Cooling System Inspection: Check for condensation or corrosion in the heatsink; resistance >10Ω between cooling fins indicates blockage.
Capacitor Health: Measure ESR (Equivalent Series Resistance) on all 10µF capacitors; >0.2Ω warrants replacement.
Service History: Units with >3 major repairs since 2020 have 40% higher failure rates.
Frequency Stability: Use a Keysight N9320B analyzer to verify <1% deviation from 13.56 MHz under load.