Various (SGL Carbon, Tokai)
Used SiC-Coated Graphite Susceptor
Various (SGL Carbon, Tokai)
Used SiC-Coated Graphite Susceptor
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used SiC-Coated Graphite Susceptor moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used SiC-Coated Graphite Susceptor cost in 2026?
Pricing for used Used SiC-Coated Graphite Susceptor units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (SGL Carbon, Tokai) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used SiC-Coated Graphite Susceptor from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
SiC-Coated Graphite Susceptor Specifications and Compatible Tools
Key specs: Thermal conductivity 180–220 W/m·K (SiC-coated), max operating temp 1,200°C, wafer OD 200/300mm. Compatible with:
- Applied Materials Centura (models 5500/6500, 2000–2010)
- Lam Research P550i (2012–2018)
- Tokai RTD-300 (2015–2020)
Exclusion: Axcelis Sxi+ (part #789-1234)—SiC coating thickness incompatible with its RF heating profile. Cross-check tool’s thermal gradient requirements before installation.
What to Check Before Buying a Used SiC-Coated Graphite Susceptor in 2026
- Coating integrity: Use a profilometer to measure SiC layer thickness. Reject if <0.08mm or >15% unevenness.
- Thermal shock history: Request pyrometer logs for >500 thermal cycles above 1,000°C. Graphite cracks after ~700 cycles.
- Dimensional tolerance: Measure flatness with a CMM. Deviation >0.05mm across wafer contact surface risks particle generation.
- Contamination levels: ICP-MS test for metallic inclusions. Reject if >5ppm Fe/Ni/Cu.
- Lifecycle data: Verify part has <10 years active use. Graphite sublimation accelerates after 8–12 years, even with coating.
FAQ
Q: Is a used SiC susceptor as reliable as new for 300mm wafers?
A: Yes, if SiC coating coverage is ≥85% and thermal cycles <700. New units have pristine coatings but cost 3–5x more.
Q: How to inspect SiC coating without specialized tools?
A: Visual check for flaking or pinholes. For depth, use a digital caliper to measure coating erosion at contact points—loss >0.05mm requires re-coating.
Q: Will a 200mm susceptor work in a 300mm tool?
A: No. Wafer clamping mechanisms and thermal profiles are diameter-specific. Always match OD to tool specs.
Q: What’s the difference between SGL Carbon and Tokai susceptors?
A: SGL uses isot
Recent Market Listings
Updated Sep 30No recent market activity for Used SiC-Coated Graphite Susceptor.
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