Used SiC-Coated Graphite Susceptor

Name: Used SiC-Coated Graphite Susceptor
Brand: Various (SGL Carbon, Tokai)
Price: 5750 USD
Availability: InStock

Market Price

→ Stable

$2K–$10K

Typical secondary market pricing · USD

Low $1,500Avg $5,750High $10,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $2K – $10K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used SiC-Coated Graphite Susceptor cost in 2026?

A used Used SiC-Coated Graphite Susceptor from Various (SGL Carbon, Tokai) typically sells for $2k – $10k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (SGL Carbon, Tokai) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used SiC-Coated Graphite Susceptor from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used SiC-Coated Graphite Susceptor Cost in 2026?

Used units priced between $2,500–$12,000 in 2026, depending on coating integrity and wafer size (200mm vs 300mm). Refurbished variants with verified SiC re-coating range $3,500–$14,000, saving 40–60% vs new OEM pricing (typically $20,000+). Caveat: Susceptors with <85% SiC coating coverage (per ASTM D7092) may void process yield guarantees. Always verify coating thickness via profilometry—spec requires ≥0.1mm SiC layer.

SiC-Coated Graphite Susceptor Specifications and Compatible Tools

Key specs: Thermal conductivity 180–220 W/m·K (SiC-coated), max operating temp 1,200°C, wafer OD 200/300mm. Compatible with:

Applied Materials Centura (models 5500/6500, 2000–2010)
Lam Research P550i (2012–2018)
Tokai RTD-300 (2015–2020)
Exclusion: Axcelis Sxi+ (part #789-1234)—SiC coating thickness incompatible with its RF heating profile. Cross-check tool’s thermal gradient requirements before installation.

What to Check Before Buying a Used SiC-Coated Graphite Susceptor in 2026

Coating integrity: Use a profilometer to measure SiC layer thickness. Reject if <0.08mm or >15% unevenness.
Thermal shock history: Request pyrometer logs for >500 thermal cycles above 1,000°C. Graphite cracks after ~700 cycles.
Dimensional tolerance: Measure flatness with a CMM. Deviation >0.05mm across wafer contact surface risks particle generation.
Contamination levels: ICP-MS test for metallic inclusions. Reject if >5ppm Fe/Ni/Cu.
Lifecycle data: Verify part has <10 years active use. Graphite sublimation accelerates after 8–12 years, even with coating.

FAQ

Q: Is a used SiC susceptor as reliable as new for 300mm wafers?
A: Yes, if SiC coating coverage is ≥85% and thermal cycles <700. New units have pristine coatings but cost 3–5x more.

Q: How to inspect SiC coating without specialized tools?
A: Visual check for flaking or pinholes. For depth, use a digital caliper to measure coating erosion at contact points—loss >0.05mm requires re-coating.

Q: Will a 200mm susceptor work in a 300mm tool?
A: No. Wafer clamping mechanisms and thermal profiles are diameter-specific. Always match OD to tool specs.

Q: What’s the difference between SGL Carbon and Tokai susceptors?
A: SGL uses isot