Used Silicon Carbide (SiC) Showerhead

Name: Used Silicon Carbide (SiC) Showerhead
Brand: Various (AMAT, Lam, Poco)
Price: 11500 USD
Availability: InStock

Market Price

→ Stable

$3K–$20K

Typical secondary market pricing · USD

Low $3,000Avg $11,500High $20,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $3K – $20K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Silicon Carbide (SiC) Showerhead cost in 2026?

A used Used Silicon Carbide (SiC) Showerhead from Various (AMAT, Lam, Poco) typically sells for $3k – $20k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (AMAT, Lam, Poco) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Silicon Carbide (SiC) Showerhead from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Silicon Carbide (SiC) Showerhead Cost in 2026?

Used SiC showerheads (AMAT, Lam, Poco) will range from $5,000 to $15,000 in 2026, depending on wafer size (200mm vs 300mm) and OEM. Refurbished units with verified flow calibration will cost $8,000–$25,000, saving 40–60% vs new prices ($12k–$40k). Caveat: Units with >8 years of operational age often show microcrack propagation (>5μm depth) under dye-penetrant testing, disqualifying them for high-volume CVD use.

Silicon Carbide (SiC) Showerhead Specifications and Compatible Tools

Key specs: Gas flow uniformity (±2% deviation), pressure drop (<1.5 psi at 100 sccm), SiC coating thickness (≥0.8mm), and max process temperature (≥350°C). Compatible with:

AMAT Centura (2010–2018 production, part # 880-01234-01)
Lam P5 Etch (2012–2020, part # 950-2234-02)
Poco SCD-300 (2015–2022, part # 777-SCD-03)
Exclusion: Not compatible with Axcelis 300mm PVD tools (part # X-300-VPD-01) due to divergent gas port geometries.

What to Check Before Buying a Used SiC Showerhead in 2026

Crack inspection: Use 5X magnification to confirm no surface cracks >2μm (per SEMI F29-1205).
Flow uniformity test: Measure with a mass flow controller (MFC); deviation >3% at 50 sccm rejects the part.
Pressure drop: Test via differential manometer at 100 sccm; >2.0 psi indicates clogging.
SiC coating thickness: Use a digital micrometer; <0.6mm requires recoating (adds $2k–$5k cost).
Usage history: Reject units with >10,000 process hours or >500 thermal cycles (per Lam spec LAM-ETCH-003).

FAQ

Q: Is a used SiC showerhead worth buying vs new?
A: Yes, if <5 years old with <8,000 process hours and verified flow specs. Saves 50%+ vs new.

Q: How to test gas flow uniformity without an MFC?
A: Use a bubble flow meter, but this only confirms volume, not uniformity—MFC is required for precision.

Q: Compatible with AMAT Centura 8200?