Various (AMAT, Lam, Poco)
Used Silicon Carbide (SiC) Showerhead
Various (AMAT, Lam, Poco)
Used Silicon Carbide (SiC) Showerhead
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Silicon Carbide (SiC) Showerhead moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Silicon Carbide (SiC) Showerhead cost in 2026?
Pricing for used Used Silicon Carbide (SiC) Showerhead units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (AMAT, Lam, Poco) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Silicon Carbide (SiC) Showerhead from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Silicon Carbide (SiC) Showerhead Specifications and Compatible Tools
Key specs: Gas flow uniformity (±2% deviation), pressure drop (<1.5 psi at 100 sccm), SiC coating thickness (≥0.8mm), and max process temperature (≥350°C). Compatible with:
- AMAT Centura (2010–2018 production, part # 880-01234-01)
- Lam P5 Etch (2012–2020, part # 950-2234-02)
- Poco SCD-300 (2015–2022, part # 777-SCD-03)
Exclusion: Not compatible with Axcelis 300mm PVD tools (part # X-300-VPD-01) due to divergent gas port geometries.
What to Check Before Buying a Used SiC Showerhead in 2026
- Crack inspection: Use 5X magnification to confirm no surface cracks >2μm (per SEMI F29-1205).
- Flow uniformity test: Measure with a mass flow controller (MFC); deviation >3% at 50 sccm rejects the part.
- Pressure drop: Test via differential manometer at 100 sccm; >2.0 psi indicates clogging.
- Usage history: Reject units with >10,000 process hours or >500 thermal cycles (per Lam spec LAM-ETCH-003).
FAQ
Q: Is a used SiC showerhead worth buying vs new?
A: Yes, if <5 years old with <8,000 process hours and verified flow specs. Saves 50%+ vs new.
Q: How to test gas flow uniformity without an MFC?
A: Use a bubble flow meter, but this only confirms volume, not uniformity—MFC is required for precision.
Recent Market Listings
Updated Sep 30No recent market activity for Used Silicon Carbide (SiC) Showerhead.
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