SMC Corporation
Used SMC Thermo-Chiller HRS Series
SMC Corporation
Used SMC Thermo-Chiller HRS Series
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used SMC Thermo-Chiller HRS Series moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used SMC Thermo-Chiller HRS Series cost in 2026?
Pricing for used Used SMC Thermo-Chiller HRS Series units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used SMC Corporation Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used SMC Thermo-Chiller HRS Series from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
SMC Thermo-Chiller HRS Series Specifications and Compatible Tools
Key specs: 5–20 kW cooling capacity, -40°C to 150°C temperature range, 220V 3-phase power, 50/60Hz frequency, and 0.5–5.0 L/min fluid flow. Compatible with:
- Applied Materials Centura Cluster Tool (1998–2005)
- Lam Research Endura P5000 (2000–2007)
- Tokyo Electron Lambda Flex (2002–2010)
Warning: Do not install on Axcelis 3200 Series tools (part #AC-CHL-32X) without a SMC-approved pressure adapter kit. Incompatibility risks compressor overloads due to mismatched PSI thresholds.
What to Check Before Buying a Used SMC Thermo-Chiller HRS Series in 2026
- Heat exchanger corrosion: Use a borescope to inspect fin arrays. Reject if >10% surface pitting or fouling is present.
- Voltage stability: Measure output with a Fluke 434 II. Deviation >5% from 220V spec invalidates performance guarantees.
- Temperature control accuracy: Validate with a Keysight 34972A data logger. Units >±1.5°C error at setpoints require recalibration.
- Age and maintenance logs: Units past 15 years (pre-2011) often have failed capacitors. Request service records showing capacitor replacements post-2020.
FAQ
Q: Used vs refurbished SMC HRS chiller — which is better?
A:
Recent Market Listings
Updated Sep 30No recent market activity for Used SMC Thermo-Chiller HRS Series.
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Quick Info
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