Used SMC Thermo-Chiller HRS Series

Name: Used SMC Thermo-Chiller HRS Series
Brand: SMC Corporation
Price: 4000 USD
Availability: InStock

Market Price

→ Stable

$1K–$7K

Typical secondary market pricing · USD

Low $1,000Avg $4,000High $7,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $1K – $7K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used SMC Thermo-Chiller HRS Series cost in 2026?

A used Used SMC Thermo-Chiller HRS Series from SMC Corporation typically sells for $1k – $7k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used SMC Corporation Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used SMC Thermo-Chiller HRS Series from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does SMC Thermo-Chiller HRS Series Cost in 2026?

Used units (pre-2018 manufacture) range from $1,500 to $5,000, while refurbished models (2018–2022 vintage) cost $3,000 to $7,000. These prices save 75–85% vs new (new HRS-10K models list at $20,000+). Refurbished units include sealed refrigerant loops and NIST-traceable calibration. Caveat: Units older than 12 years (post-2014) often show >15% efficiency loss due to degraded heat exchanger fins. Always verify serial number production dates via SMC’s PartMaster database before purchase.

SMC Thermo-Chiller HRS Series Specifications and Compatible Tools

Key specs: 5–20 kW cooling capacity, -40°C to 150°C temperature range, 220V 3-phase power, 50/60Hz frequency, and 0.5–5.0 L/min fluid flow. Compatible with:

Applied Materials Centura Cluster Tool (1998–2005)
Lam Research Endura P5000 (2000–2007)
Tokyo Electron Lambda Flex (2002–2010)
Warning: Do not install on Axcelis 3200 Series tools (part #AC-CHL-32X) without a SMC-approved pressure adapter kit. Incompatibility risks compressor overloads due to mismatched PSI thresholds.

What to Check Before Buying a Used SMC Thermo-Chiller HRS Series in 2026

Heat exchanger corrosion: Use a borescope to inspect fin arrays. Reject if >10% surface pitting or fouling is present.
Voltage stability: Measure output with a Fluke 434 II. Deviation >5% from 220V spec invalidates performance guarantees.
Refrigerant integrity: Run a Halide torch leak test. Any trace of refrigerant loss requires full loop recharging (avg. $800–$1,200).
Temperature control accuracy: Validate with a Keysight 34972A data logger. Units >±1.5°C error at setpoints require recalibration.
Age and maintenance logs: Units past 15 years (pre-2011) often have failed capacitors. Request service records showing capacitor replacements post-2020.

FAQ

Q: Used vs refurbished SMC HRS chiller — which is better?
A: Refurbished units (2018–2022) include updated capacitors and seals; used units (pre-2018) require budgeting for $1,000–$2,500 in rebuild costs.

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