Various (Asyst, Brooks)
Used SMIF Pod (200mm)
Various (Asyst, Brooks)
Used SMIF Pod (200mm)
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-11
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for Used SMIF Pod (200mm) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used SMIF Pod (200mm) cost in 2026?
Pricing for used Used SMIF Pod (200mm) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (Asyst, Brooks) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used SMIF Pod (200mm) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
SMIF Pod (200mm) Specifications and Compatible Tools
Key specs: 330mm height, 280mm diameter, polycarbonate construction, 15kg weight. Operates at ambient temperature (0–40°C), with O-ring durometer rating 70–80 Shore A. Compatible with:
- Applied Materials Centura (1998–2005)
- Lam Research Etch Pro (2000–2006)
- Tokyo Electron Pulsed-CVD (2002–2008)
Exclusion: Not compatible with Axcelis 3200 series (part #AX-3200-POD) due to incompatible door actuation mechanism. Verify tool’s pod interface dimensions (ISO 13103 standard) before purchase.
What to Check Before Buying a Used SMIF Pod (200mm) in 2026
- Crack inspection: Use a 10x magnifier; reject if >2 hairline fractures (>0.1mm deep) on interior walls.
- Seal integrity: Perform pressure decay test (500 Pa for 5 mins); >1.2% pressure loss indicates failed O-ring.
- Hinge wear: Measure door hinge play with dial gauge; >0.5mm lateral movement disqualifies.
- Contamination history: Request particle count log; >1,000 particles/ft³ (0.5µm) suggests improper cleaning.
- Cycle count: Pods with >7,000 cycles (avg. 2020–2022 usage) require full refurbishment. Use a digital counter or check wear on load-lock seals.
FAQ
Q: Are used SMIF Pods (200mm) as reliable as new?
A: Yes, if refurbished per SEMI E19 guidelines. Used pods with <3,000 cycles retain 95% of new performance.
Q: How to test seal integrity without specialized equipment?
A: Use a smoke test: inject incense smoke into the pod; visible leakage past the door seal indicates failure.
Q: Compatible with 300mm wafer tools?
A: No. 200mm pods are incompatible with 300
Recent Market Listings
Updated Sep 30No recent market activity for Used SMIF Pod (200mm).
Submit a bid to get notified when sellers list this part.
Place a bid →Related Parts
Applied Materials
Applied Materials 0020-Series Chamber Parts
Applied Materials
Applied Materials 0190-Series Process Parts
Applied Materials
Applied Materials ESC — Electrostatic Chuck
Applied Materials
AMAT Centura Chamber Parts & Components
Applied Materials
AMAT Endura PVD Target & Shield Parts
Fujikin
Fujikin Pneumatic Diaphragm Valve
Quick Info
Get a Quote
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
Place a Bid or Ask
Connect with verified buyers and sellers for Used SMIF Pod (200mm).
All transactions are export compliant · Escrow available · parts@caladansemi.com