Used VAT Gate Valve for Semiconductor

Name: Used VAT Gate Valve for Semiconductor
Brand: VAT Group

Market Price

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Available by Request

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used VAT Gate Valve for Semiconductor moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used VAT Gate Valve for Semiconductor cost in 2026?

Pricing for used Used VAT Gate Valve for Semiconductor units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used VAT Group Vacuum Components vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used VAT Gate Valve for Semiconductor from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

VAT Gate Valve Specifications and Compatible Tools

Key specs: 1×10⁻⁹ Torr ultimate vacuum, 220V AC, 50/60Hz, 150 sccm gas flow, and 0.5–2.0 bar pressure range. Compatible with:

Applied Materials Centura (2008–2012)
Lam Research Endura P5000 (2010–2015)
ASMI Fusion-F200 (2013–2018)
Tokyo Electron Lambda Flex (2011–2016)

Exclusion warning: Do not install on Varian 300mm PECVD systems (part no. V-PECVD-300)—their pressure cycling profile exceeds the VAT valve’s 1.8 bar max differential, risking diaphragm rupture. Always cross-check tool’s pressure transient logs with the valve’s spec sheet.

What to Check Before Buying a Used VAT Gate Valve in 2026

Diaphragm thickness: Measure with a digital micrometer; reject if <0.15mm (original spec: 0.18–0.22mm).
Leak rate: Test with a helium mass spectrometer; must be ≤1×10⁻¹⁰ Torr·L/s.
Actuator travel: Use a dial gauge; deviation >0.5mm indicates worn bushings.
Seal history: Request service logs; valves >8 years old without seal replacement show 20–30% higher failure rates.
Corrosion signs: Inspect interior for etch residue (e