VAT Pendulum Control Valve (64/65 Series)

Name: VAT Pendulum Control Valve (64/65 Series)
Brand: VAT Group

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for VAT Pendulum Control Valve (64/65 Series) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used VAT Pendulum Control Valve (64/65 Series) cost in 2026?

Pricing for used VAT Pendulum Control Valve (64/65 Series) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used VAT Group Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used VAT Pendulum Control Valve (64/65 Series) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

VAT Pendulum Control Valve (64/65 Series) Specifications and Compatible Tools

Key specs: 24V DC power, 0–100 SCCM flow range, 0.1–10 bar pressure rating, 50–60 Hz frequency tolerance. Compatible with:

Applied Materials Centura (1998–2005)
Lam Research Endura (2000–2007)
ASM AMAT5200 (1999–2003)
Exclusion: Not compatible with VAT 70 Series tools (Part #70-VAL-12X) due to mismatched actuator port threads (M10 vs M8). Cross-reference tool’s I/O board revision (VAT-IOB-3.2 or later required).

What to Check Before Buying a Used VAT Pendulum Control Valve (64/65 Series) in 2026

Corrosion inspection: Measure body wall thickness with a digital micrometer—reject if <1.2mm (original spec: 1.5mm).
Solenoid resistance test: Use a multimeter; 24V models must read 38–42Ω. Deviations >5% indicate winding degradation.
Diaphragm integrity: Pressurize to 8 bar with a hydraulic tester; leakage >0.5 mL/min invalidates the part.
O-ring age check: Reject units with Viton seals manufactured before 2018 (batch codes on valve base).
Cycle counter validation: Use VAT’s VC-Tools software to verify cycle count. >300k cycles mandates actuator rebuild.