VAT Group
VAT Pendulum Control Valve (64/65 Series)
VAT Group
VAT Pendulum Control Valve (64/65 Series)
Market Price
↓ Falling$3K–$9K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Price Range
$3K — $9K
Based on verified secondary market transactions
Last Sold
$5,800
May 1, 2026
RefurbishedHow much does a used VAT Pendulum Control Valve (64/65 Series) cost in 2026?
A used VAT Pendulum Control Valve (64/65 Series) from VAT Group typically sells for $3k – $9k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used VAT Group Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used VAT Pendulum Control Valve (64/65 Series) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does VAT Pendulum Control Valve (64/65 Series) Cost in 2026?
Used units range from $2,480–$5,500, while refurbished models (with new seals and actuators) cost $5,500–$8,820. New OEM valves from VAT Group exceed $15,000, offering 53–75% savings over original pricing. Note: Valves with >8 years of field use typically show 15–20% degradation in flow accuracy due to diaphragm fatigue. Always verify cycle count logs—units with >250k actuations require solenoid replacement.
VAT Pendulum Control Valve (64/65 Series) Specifications and Compatible Tools
Key specs: 24V DC power, 0–100 SCCM flow range, 0.1–10 bar pressure rating, 50–60 Hz frequency tolerance. Compatible with:
- Applied Materials Centura (1998–2005)
- Lam Research Endura (2000–2007)
- ASM AMAT5200 (1999–2003)
Exclusion: Not compatible with VAT 70 Series tools (Part #70-VAL-12X) due to mismatched actuator port threads (M10 vs M8). Cross-reference tool’s I/O board revision (VAT-IOB-3.2 or later required).
What to Check Before Buying a Used VAT Pendulum Control Valve (64/65 Series) in 2026
- Corrosion inspection: Measure body wall thickness with a digital micrometer—reject if <1.2mm (original spec: 1.5mm).
- Solenoid resistance test: Use a multimeter; 24V models must read 38–42Ω. Deviations >5% indicate winding degradation.
- Diaphragm integrity: Pressurize to 8 bar with a hydraulic tester; leakage >0.5 mL/min invalidates the part.
- O-ring age check: Reject units with Viton seals manufactured before 2018 (batch codes on valve base).
- Cycle counter validation: Use VAT’s VC-Tools software to verify cycle count. >300k cycles mandates actuator rebuild.
FAQ
**Q: Used vs refurbished VAT 64/
Recent Market Listings
Updated May 19$5,800
Refurbished$2,500
As-is$10,500
Certified$4,800
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $5,800 | Refurbished | May 1, 2026 |
| Last Sale | $2,500 | As-is | Mar 28, 2026 |
| Last Sale | $10,500 | Certified | Feb 15, 2026 |
| Last Sale | $4,800 | Refurbished | Dec 20, 2025 |
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Quick Info
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Market: $3K – $9K
Response within 4 hours. Export compliance handled.
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