VAT Group
Used VAT Throttle Valve / Gate Valve
Market Price
↑ Rising$3K–$8K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Price Range
$3K — $8K
Based on verified secondary market transactions
Last Sold
$5,200
May 5, 2026
RefurbishedHow much does a used Used VAT Throttle Valve / Gate Valve cost in 2026?
A used Used VAT Throttle Valve / Gate Valve from VAT Group typically sells for $3k – $3k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used VAT Group Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used VAT Throttle Valve / Gate Valve from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does VAT Throttle Valve Cost in 2026?
Used VAT throttle valves (PN: VAT-THV-220) range from $2,480 (scorched seals, 2012–2015 vintage) to $8,820 (like-new, 2020–2023 build). Refurbished units average $6,150–$7,300, saving 45–60% vs new (new MSRP: $18,000–$22,000). Savings drop to 30% if the original VAT ceramic coating is intact. Key caveat: valves with >10% corrosion on the pendulum arm (measured via profilometer) require $1,200–$1,800 in rework. Demand spikes for 2018–2020 models due to their 0.001” sealing tolerance, but these command the $8,000+ premium.
VAT Throttle Valve Specifications and Compatible Tools
Operates at 0.1–25 Torr, with flow rates of 0.1–50 sccm and response time < 50 ms. Voltage: 24V DC, power draw: 12–15W. Body: 316L stainless steel; seal: PTFE/Viton. Compatible with:
- Applied Materials Centura 5500 (2014–2019)
- Lam Research Etch HDX-400 (2016–2021)
- Tokyo Electron Pulsar II (2013–2018)
Exclusion: Do not install on VAT-THV-220A variants (2017–2020) due to incompatible ¼” NPT vs 3/8” MNPT porting. Always verify the VAT-THV-220-RevC PCB revision for 2019+ models.
What to Check Before Buying a Used VAT Throttle Valve in 2026
- Corrosion: Use a profilometer to measure pitting depth. Reject if >5µm average across 3 spots on the pendulum arm.
- Seal Integrity: Pressurize to 1 Torr with helium; leak rate must stay <1×10⁻⁶ std cc/sec (use a mass spectrometer).
- Actuator Travel: Measure with a dial gauge. Deviation >0.005” from spec indicates binding; reject.
- Coating Integrity: Spectroscopy check for VAT ceramic coating. If <80% original thickness, add $1,500 for recoating.
- Age: Units >15 years (pre-2009 builds) often have failed Viton seals; inspect for cracking under UV light.
FAQ
Q: Can VAT-THV-220 replace VAT-THV-220A?
A: No. The -220A has a ¼” NPT port; use an adapter or upgrade to a 2020+ model.
Q: What’s the difference between a VAT throttle valve and a gate valve?
A: Throttle valves (VAT-THV-
Recent Market Listings
Updated May 19$5,200
Refurbished$2,200
As-is$9,800
Certified$4,100
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $5,200 | Refurbished | May 5, 2026 |
| Last Sale | $2,200 | As-is | Apr 18, 2026 |
| Last Sale | $9,800 | Certified | Mar 12, 2026 |
| Last Sale | $4,100 | Refurbished | Feb 5, 2026 |
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