Used AMAT Mirra Mesa CMP: What to Check Before Buying
Compare a used AMAT Mirra Mesa CMP against your process: verify configuration, polishing results, included consumables and acceptance terms before buying.
Before buying a used AMAT Mirra Mesa CMP, ask for a configuration list and a witnessed polishing demonstration against your own acceptance criteria. Use the equipment label, serial number and documented refurbishment scope to identify what is actually being offered.
Match the configuration before comparing prices
Give the seller your wafer format, film stack, incoming film condition and required polishing result. Ask for the installed polishing and cleaning modules, carrier heads, endpoint hardware, slurry delivery equipment and software options to be listed separately. Mark each item as included, excluded or awaiting verification.
Do not treat a Mirra, Mirra Mesa or Reflexion listing as an equivalent offer without reviewing its configuration. Use the Mirra and Reflexion buying guide to prepare comparison questions, then resolve them against the offered tool's records.
Put polishing acceptance in writing
Ask your process engineer to define the demonstration recipe and acceptance limits. Record the pad, conditioner, slurry, carrier setup and measurement method used for the run. Have authorized personnel operate the tool under the site's approved procedures.
Request before-and-after measurements on the agreed samples. Include removal rate, within-wafer uniformity, repeatability, surface defects and cleaning results where relevant to your process. Require the seller to identify the metrology used and supply the raw results alongside the summary.
Keep endpoint and safety settings within the approved test procedure. Do not disable endpoint sensors simply to complete a purchasing demonstration.
Inspect the maintenance scope
Request service records for the carrier heads, platen assemblies, pad conditioners, slurry path and cleaning equipment included in the offer. Ask for a witnessed check for leaks and a list of unresolved alarms. Request photographs of wear surfaces and an itemized explanation of what the seller means by refurbished.
For consumables, ask for part numbers, remaining quantities, storage records and your process team's approval of the proposed pad/slurry combination. Avoid assigning a cost per wafer before the consumable set and recipe are agreed.
Compare the total purchase scope
Ask each bidder to separate equipment price, refurbishment, consumables, removal, shipping, installation and acceptance support. Document exclusions and responsibility for failed acceptance before selecting the offer. See the CMP equipment buying guide for related purchase questions.
What should a Mirra Mesa RFQ include? Send the required wafer format, film stack, acceptance measures, destination and desired scope. Ask for the serial number, module list, maintenance history and proposed demonstration in reply.
When should I consider another CMP platform? When the offered configuration cannot document or demonstrate your required process. Request the same evidence from each alternative before comparing cost.
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.