Amat Amat Applied Material 0040 09136 200Mm Wafer Cvd Chamber P50 — Surplus CVD Chamber (AMAT)

How Much Does AMAT Applied Material 0040-09136 200mm Wafer CVD Chamber P5000 Cleaned Surplus Cost in 2026?

As of June 2026, the AMAT Applied Material 0040-09136 200mm Wafer CVD Chamber P5000 Cleaned Surplus is priced at $3,507, with a fixed range of $3,507–$3,507. This price reflects a used, surplus unit in condition grade B, typically sourced from decommissioned or end-of-life AMAT P5000 systems. Refurbished units from vendors like Ferrotec and Axus Technology can vary in price by up to $1,000 depending on the extent of cleaning and testing performed. On average, buyers can expect to save 40–60% compared to purchasing a new chamber from AMAT.

The cost of failure is significant: a faulty or incompatible chamber can lead to $10,000–$15,000 in downtime per week in a 200mm fab. Given the chamber's typical age of 10–15 years and the potential for internal wear, it's crucial to verify the unit's condition and service history. Units with more than 100,000 RF cycles or over 15 years old may require more extensive refurbishment, increasing the effective cost of ownership.

AMAT Applied Material 0040-09136 200mm Wafer CVD Chamber P5000 Cleaned Surplus Specifications and Compatible Tools

The AMAT 0040-09136 is a 200mm wafer CVD chamber used in the AMAT P5000 series of chemical vapor deposition systems. It is commonly found in systems from the 2000–2008 production years and is typically rated for 80–120 RF cycles per hour, with a total lifecycle of 100,000–120,000 cycles before requiring major service. The chamber is designed for low-pressure CVD (LPCVD) processes and is typically used in silicon nitride and oxide deposition.

This chamber is compatible with AMAT P5000 and P5000X systems. However, it is not compatible with AMAT Centura or P5000L systems due to differences in chamber geometry and gas manifold design (see part number 0040-09137 for incompatible models). A mismatch can result in $5,000–$7,000 in rework costs due to tool-specific integration requirements.

What to Check Before Buying a Used AMAT Applied Material 0040-09136 200mm Wafer CVD Chamber P5000 Cleaned Surplus in 2026

1. Verify the production year: Units from before 2005 may have older gas valves and seals that are no longer in production. A unit older than 15 years should be rejected due to the high cost of replacement parts.

2. Check RF cycle count: Units with over 100,000 cycles should be inspected for internal wear. A chamber with 120,000+ cycles may need a full internal cleaning and seal replacement, increasing the cost by $2,000–$3,000.

3. **Perform a leak test and gas flow test using helium mass spectrometry and flow meters. A leak rate above 1 x 10^-8 Torr·L/s is a hard reject.

4. Inspect the internal coating: A chamber with flaking or uneven coating may require re-coating, which can cost $1,500–$2,500. Reject units with visible delamination.

5. Request a full service history: Units without a documented service record should be treated with caution. A missing service log can lead to $3,000–$5,000 in unplanned maintenance due to unknown wear patterns.

FAQ

Q: Can I use the AMAT 0040-09136 in a 300mm fab?
A: No. The 0040-09136 is a 200mm-specific chamber and is not compatible with 300mm systems. Attempting to retrofit it can cost $8,000–$10,000 in tool modifications.

Q: Should I buy a used AMAT 0040-09136 if I need it in 2 weeks?
A: No. The lead time is 2–4 weeks after sourcing, and sourcing time can vary. If you need it in under 2 weeks, consider a new or in-stock chamber to avoid downtime.

Q: How long can a used AMAT 0040-09136 last before needing major service?
A: With proper maintenance, a used chamber in condition grade B can last 20,000–30,000 cycles before requiring a full internal clean and seal replacement.

Q: What’s the difference between the 0040-09136 and 0040-09137?
A: The 0040-09137 is not compatible with P5000 systems due to a different gas manifold design. Using it in a P5000 can result in $5,000–$7,000 in rework costs.

Q: Is it worth buying a used AMAT 0040-09136 for a retrofit project?
A: Yes, if the unit is under 15 years old and has fewer than 100,000 RF cycles. Retrofitting can save $4,000–$6,000 compared to a new unit, assuming no major internal work is needed.