Amat Amat Applied Material 0040 09221 200Mm Wafer Cvd Chamber P50 — Used CVD Chamber for 200mm Processes (AMAT)

How Much Does AMAT Applied Material 0040-09221 200mm Wafer CVD Chamber P5000 Cleaned Surplus Cost in 2026?

As of June 2026, the AMAT 0040-09221 200mm wafer CVD chamber, cleaned and surplus, is priced at $3,507. This is a single-tier listing due to the part being in a consistent “B” condition—cleaned but not fully refurbished. Refurbished units from vendors like Ferrotec or Axus Technology typically range from $4,200 to $5,000, depending on the extent of service. A used but uncleaned version might cost $2,800–$3,200, but these are not recommended due to the high risk of internal contamination.

Purchasing a used or refurbished CVD chamber can save 40–60% compared to a new OEM unit, which typically exceeds $8,000. However, a failed chamber can cost a fab $12,000–$15,000 per hour in downtime, especially if it causes a full tool shutdown. Be cautious—this part is typically 10–15 years old, and internal wear may not be visible during inspection. Always request a full internal inspection and pressure test before purchase.

AMAT Applied Material 0040-09221 200mm Wafer CVD Chamber P5000 Cleaned Surplus Specifications and Compatible Tools

The AMAT 0040-09221 is a 200mm wafer CVD chamber used in Applied Materials’ P5000 series. It is commonly found in systems like the P5000 Centura and P5000 DPS, typically deployed between 2002 and 2007. The chamber is rated for up to 10,000 RF hours and is designed for low-pressure chemical vapor deposition (LPCVD) processes. It supports standard 200mm wafer handling and is compatible with standard AMAT gas delivery systems.

This part is not compatible with the AMAT 0040-09222 chamber, which is a different model with a different internal geometry. Using the wrong chamber can lead to process instability and wafer defects, potentially costing $5,000–$7,000 per batch. Verify the part number and tool model before installation. The chamber is typically rated for 10–15 years of service life, but actual performance depends on maintenance and process conditions.

What to Check Before Buying a Used AMAT Applied Material 0040-09221 200mm Wafer CVD Chamber P5000 Cleaned Surplus in 2026

1. Internal Inspection: Request a full internal inspection, including a visual check for pitting, corrosion, or buildup. Reject if there is visible damage or residue in the chamber walls.
2. Pressure Test: A leak rate of >1 x 10^-6 mbar·L/s is a hard reject. This indicates a compromised seal and can lead to process failure.
3. RF Hours: Units with more than 12,000 RF hours are high-risk. These are more likely to have internal wear that affects deposition uniformity.
4. Production Year: Units made before 2005 may have different internal coatings. Confirm the year of manufacture to avoid compatibility issues.
5. Cleaning Method: Ensure the chamber was cleaned using a documented, semiconductor-grade process. Poor cleaning can lead to contamination and wafer loss, costing $3,000–$5,000 per incident.

Failure to inspect thoroughly can result in a non-functional chamber, leading to $10,000–$12,000 in lost throughput and repair costs. Always work with a trusted vendor and request a full inspection report.

FAQ

Q: Can I use the AMAT 0040-09221 in a P5000 DPS system?
A: Yes, the 0040-09221 is commonly used in P5000 DPS systems from 2002–2005. However, it is not compatible with the 0040-09222 model due to different internal geometries.

Q: Should I buy a used CVD chamber if I need it in 2 weeks?
A: If the chamber is in a “B” condition and cleaned, it can be sourced and delivered in 2–4 weeks. However, if you need a fully refurbished unit, lead times can extend to 6–8 weeks.

Q: How long does a used 0040-09221 typically last?
A: With proper maintenance, a used chamber can last 4–6 years in production. Units with more than 12,000 RF hours are high-risk and should be inspected thoroughly.

Q: What is the difference between a cleaned and a refurbished chamber?
A: A cleaned chamber is visually inspected and decontaminated but not fully serviced. A refurbished unit includes internal cleaning, pressure testing, and seal replacement. Refurbished units typically cost $4,200–$5,000, while cleaned units are priced at $3,500.

Q: Is it worth the savings to buy a used CVD chamber?
A: Yes, if you can verify the condition and compatibility. A used chamber can save $4,000–$5,000 compared to a new unit. However, a failed chamber can cost $12,000–$15,000 in downtime, so due diligence is critical.