Used KLA Surfscan SP1, SP2 and SP3 Buying Guide
OEM-sourced Surfscan model distinctions and used-tool checks. Prior unsupported pricing withdrawn; request a unit-specific quote and test evidence.
Correction — September 30, 2026: We previously published Surfscan price ranges, repair-cost estimates and transaction anecdotes that were insufficiently supported. That was our mistake. We have removed them, corrected technical errors using KLA sources, and apologize for the misleading guidance. Do not use the earlier figures for budgeting or valuation. We do not have sufficient verified transaction evidence to publish a replacement market-value range.
This guide is for: Engineers and buyers evaluating a used Surfscan for unpatterned wafer inspection. Start with the required inspection result and the exact offered configuration, not an assumed price for a model name.
SP1, SP2 and SP3: identify the actual platform
KLA's SP3 launch announcement, dated July 11, 2011, identifies SP1 as visible-light, SP2 as ultraviolet (UV), and SP3 as deep-ultraviolet (DUV). Our earlier description of SP2 as a dual-visible-laser system was incorrect. DUV is a defining feature of the SP3 platform, not merely an optional upgrade.
| Platform | What the OEM documentation establishes | What to verify on the offered unit |
|---|---|---|
| SP1 | Visible-light predecessor to SP2 | Exact configuration, required sensitivity and serviceability |
| SP2 / SP2XP | UV illumination; the family brochure describes 200mm/300mm configurations | Installed handler, illumination modes, software options and test results |
| SP3 | DUV source and optics; introduced for applications at the 28nm device node and below | Exact model, wafer format, enabled options and application-specific acceptance results |
Sources: KLA SP2/SP2XP brochure and the SP3 launch announcement above. These describe platforms, not the condition or capabilities of an individual used machine.
Do not interchange SP2XP, SP2A and SP A2
KLA documents SP2XP-specific dual-scan operation, brightfield differential interference contrast, extended dynamic range and rule-based binning. Do not assume a base SP2 has those features. The SP2XP announcement provides the historical model distinction.
A seller's “SP2A” label alone does not establish an OEM variant or performance premium. KLA's separately named SP A2 and SP A3 are DUV systems; its 2024 fact sheet specifies 150mm/200mm for SP A2 and 300mm for SP A3. Check the nameplate and configuration records rather than rearranging the model characters.
Sensitivity must be demonstrated, not inferred from a node
KLA's SP2 brochure describes defect detection as small as 37nm under its stated platform conditions. That is not a guarantee for every used SP2, wafer surface or scan recipe. Similarly, a device design node is not a particle-size acceptance limit. Our earlier blanket sensitivity cutoffs and reclaim-application recommendations were not adequately supported.
Ask your metrology team to define the wafer material, diameter, surface, defect types, reference standards, scan modes, throughput and repeatability needed. Require dated results tied to the unit's serial number. Record the recipe and test conditions so the result can be reproduced at acceptance.
Check laser, optics and handling with an agreed test plan
Request the installed laser identification, maintenance records, replacement history and available runtime and power-stability records. We are not publishing a universal laser-hour retirement threshold or replacement price: obtain the applicable service guidance and a written quote for that unit.
For the demonstration, agree on reference-wafer scans, repeated measurements, full-wafer maps and any required haze or surface-quality measurements. Ask a qualified service engineer to evaluate optical alignment, handling and stage performance. Missing records are an unresolved risk, not proof of a particular failure or remaining lifetime.
Ask for a complete commercial scope, not a model-level value
We cannot substantiate a current SP2 or SP3 market-value range from verified transactions. An advertised asking price is not a completed sale, and multiple advertisements should not be treated as independent comparables without checking asset identity.
Request separate written amounts for the tool, repairs, packing and rigging, freight and insurance, applicable duties and taxes, software rights, installation, calibration and acceptance. Confirm which items are included. “As-is,” “tested” and “refurbished” should be defined in the offer, with the test date, exclusions and any warranty stated explicitly.
Before a deposit, obtain a legible nameplate, serial-linked configuration and packing list, current location, seller's authority to sell, deinstallation/storage history and written software-transfer and service confirmation. Do not assume the presence of an installed program establishes a new owner's license rights.
Frequently Asked Questions
Q: What does a used Surfscan SP2 or SP3 cost? A: We have withdrawn the earlier price ranges because they were insufficiently supported. Request a current quote for an identified unit and defined scope; we are not substituting unverified asking prices for market value.
Q: Is SP2 UV and SP3 DUV? A: Yes. KLA's linked SP3 launch announcement explicitly makes that distinction. Our previous dual-visible-laser description of SP2 was incorrect.
Q: How much does laser replacement or calibration cost? A: Obtain a written, unit-specific service quote. The earlier generic cost and lifetime estimates have been removed rather than replaced with another unsupported allowance.
Q: Which model is suitable for reclaim wafer inspection? A: Decide from the required defect detection, wafer configuration and acceptance data. A model name or device node alone does not prove fitness for your application.
Contact Caladan with your inspection requirements if you need help requesting a documented configuration and quote. This guide is not an offer of verified stock.
Related reading: Used Surfscan SP3 buyer's guide. OEM sources checked September 30, 2026.
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.