Aixtron CRIUS MOCVD Susceptor

Aixtron CRIUS MOCVD Susceptor Specifications and Compatible Tools

Key specs: graphite body with SiC coating, max operating temperature 1,250°C, rotational speed 1–20 RPM, and thermal mass for ±5°C uniformity across 200mm wafers. Compatible with CRIUS 200 (2012–2018), CRIUS 400 (2015–2020), and CRIUS X200 (2017–2022). Exclusion warning: Not compatible with AixG5 systems (part # AG5-SUS-01) due to divergent susceptor geometry and RF coupling requirements. Verify tool’s RF power input (CRIUS uses 2–6 kW vs AixG5’s 8–12 kW).

What to Check Before Buying a Used Aixtron CRIUS MOCVD Susceptor in 2026

1. SiC coating integrity: Use a laser micrometer to confirm thickness ≥50 µm; reject if <40 µm.
2. Thermal cycling history: Request logs; >500 cycles may compromise graphite substrate density (test via X-ray tomography).
3. Rotation mechanism: Measure bearing play with a dial gauge (<0.02 mm radial runout acceptable).
4. Delamination inspection: Perform ultrasonic testing for voids in coating-substrate interface.
5. Process history: Avoid parts used for AlGaN (≥30% Al content) without SiC recoating, as AlN byproducts degrade coating adhesion.

FAQ

Q: Is a used CRIUS susceptor better than refurbished?
A: Used parts save 40–60% vs new but risk coating wear. Refurbished units (recoated, recertified) balance cost and reliability for high-cycle processes.

Q: Does the CRIUS 400 susceptor fit a CRIUS X200?
A: Yes, but X200 requires a susceptor with upgraded RF shielding (part # CRX-SUS-02).

Q: How long does a CRIUS susceptor last?
A: 300–500 thermal cycles before recoating, depending on process chemistry and temperature profiles.

Q: What test confirms coating adhesion?
A: Perform a scratch test (ASTM D4995) with a diamond stylus at 50 N; adhesion failure <1 mm radius is acceptable.