Amat Parker Amat Wafer Td3 Linear Stage Table Assembly 803 1246A — Linear Stage for Wafer Handling (AMAT)

How Much Does PARKER AMAT Wafer TD3 Linear Stage Table Assembly 803-1246A NEW Cost in 2026?

In 2026, the price for a used or refurbished AMAT Wafer TD3 Linear Stage Table Assembly 803-1246A typically ranges from $12,501–$12,501, depending on condition and sourcing. Units in Grade A condition (less than 100,000 cycles and full calibration) can command up to $15,000, while Grade C or D units with more than 150,000 cycles or missing calibration data may be listed for as low as $9,000.

Refurbished units from trusted vendors like Ferrotec and Covalent Materials typically fall in the $12,500–$13,000 range, offering 40–60% savings over a new OEM unit, which can cost $25,000–$30,000.

A failure to source a compatible unit can lead to $10,000–$15,000 in downtime costs per week, depending on the fab’s production rate. Units with more than 120,000 cycles are at higher risk of bearing wear and should be inspected thoroughly before purchase.

PARKER AMAT Wafer TD3 Linear Stage Table Assembly 803-1246A NEW Specifications and Compatible Tools

The AMAT Wafer TD3 Linear Stage Table Assembly 803-1246A is a high-precision linear motion system designed for wafer handling in deposition and etch tools. It typically features a stroke length of 500 mm, a load capacity of 15 kg, and a resolution of 0.1 µm. The stage is commonly used in AMAT’s Centura and Endura platforms, particularly in systems manufactured between 2008 and 2015.

The stage is typically rated for 100,000–150,000 motion cycles before requiring major maintenance. Units with more than 180,000 cycles may show signs of wear in the linear bearings or motor encoder.

This part is not compatible with AMAT’s newer Nexus or Producer platforms, especially those using part number 803-1246B. Using an incompatible stage can lead to wafer misalignment and process failure, costing $5,000–$7,000 per incident in rework and scrap.

What to Check Before Buying a Used PARKER AMAT Wafer TD3 Linear Stage Table Assembly 803-1246A NEW in 2026

1. Cycle Count: Ensure the unit has less than 120,000 cycles. Units with more than this are at risk of bearing wear and should be rejected.
2. Encoder Calibration: Request a calibration report or perform a laser interferometry test to verify accuracy.
3. Motor Health: Run a no-load motor test to check for current draw anomalies. A motor drawing more than 2.5 A at idle is a red flag.
4. Bearing Condition: Inspect for play in the linear bearings. Any movement greater than 0.02 mm should be a hard reject.
5. Production Year: Units made before 2010 may use older motor controllers that are incompatible with newer AMAT systems.

Failing to verify these factors can result in $8,000–$12,000 in installation and rework costs due to misalignment or failure during process steps.

FAQ

Q: Can I use the 803-1246A in a newer AMAT system like the Producer?
A: No. The 803-1246A is not compatible with systems using the 803-1246B part number. Attempting to install it can cause wafer misalignment, leading to $6,000–$9,000 in rework costs per incident.

Q: Should I buy a used 803-1246A with 140,000 cycles?
A: It depends. Units with 140,000 cycles are at the upper limit and may require bearing replacement soon. If the unit is priced under $11,500, it may still be a good value, but ensure the encoder and motor are fully tested.

Q: How long does the 803-1246A typically last before needing a rebuild?
A: On average, the stage lasts 100,000–150,000 cycles before requiring a rebuild. Units with more than 180,000 cycles should be inspected for bearing wear and encoder drift.

Q: How does the 803-1246A compare to the 803-1246B?
A: The 803-1246B is a newer revision with improved motor controllers and higher cycle ratings. The 803-1246A is typically rated for 150,000 cycles, while the 803-1246B is rated for 200,000 cycles.

Q: What is the downtime cost if this part fails in a production tool?
A: A failure in a production tool can lead to $10,000–$15,000 in downtime per week, depending on the fab’s throughput and the time required to source and install a replacement.