1001234 — Ion Source Assembly (Axcelis Technologies)

Name: 1001234 — Ion Source Assembly (Axcelis Technologies)
Brand: Axcelis Technologies
SKU: 1001234

Part No. 1001234

Market Price

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Available by Request

Last verified: 2026-05-11

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 1001234 — Ion Source Assembly (Axcelis Technologies) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 1001234 — Ion Source Assembly (Axcelis Technologies) cost in 2026?

Pricing for used 1001234 — Ion Source Assembly (Axcelis Technologies) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Axcelis Technologies Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 1001234 — Ion Source Assembly (Axcelis Technologies) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

1001234 Specifications and Compatible Tools

Key specs: 8.2 kW power draw, 50–500 sccm gas flow (BF₃, PH₃ compatible), 2 kV ion acceleration voltage, 13.56 MHz RF frequency. Compatible with Axcelis Purion H (models 9530, 9535) produced 2012–2018. Exclusion: Not compatible with Axcelis CAMECA 1280 (part number 1280-ION-01) due to RF circuitry mismatch. Verify tool’s ion beam steering coil model (must be 1001234-SC-02 or earlier). Purion H+ variants require firmware update 4.3B for 1001234 integration.