1001234 — Ion Source Assembly (Axcelis Technologies)

Name: 1001234 — Ion Source Assembly (Axcelis Technologies)
Brand: Axcelis Technologies
SKU: 1001234
Price: 7965 USD
Availability: InStock

Part No. 1001234

Market Price

→ Stable

1 active listing

$5K–$11K

Typical secondary market pricing · USD

Low $4,980Avg $7,965High $10,950

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $5K – $11K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used 1001234 — Ion Source Assembly (Axcelis Technologies) cost in 2026?

A used 1001234 — Ion Source Assembly (Axcelis Technologies) from Axcelis Technologies typically sells for $5k – $11k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Axcelis Technologies Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 1001234 — Ion Source Assembly (Axcelis Technologies) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 1001234 Cost in 2026?

Used 1001234 ion source assemblies range from $4,980–$7,500 (tested and calibrated), while refurbished units (with cathode and sensor replacements) cost $7,500–$10,950. New units from Axcelis exceed $25,000, offering 40–65% savings with used/refurbished options. Caveat: Units with >15,000 operational hours often show cathode erosion, reducing beam stability below 15% variance (spec requires ≤10%). Always verify gas leak rates (<1×10⁻⁶ Torr·L/s) and RF matching network integrity before purchase.

1001234 Specifications and Compatible Tools

Key specs: 8.2 kW power draw, 50–500 sccm gas flow (BF₃, PH₃ compatible), 2 kV ion acceleration voltage, 13.56 MHz RF frequency. Compatible with Axcelis Purion H (models 9530, 9535) produced 2012–2018. Exclusion: Not compatible with Axcelis CAMECA 1280 (part number 1280-ION-01) due to RF circuitry mismatch. Verify tool’s ion beam steering coil model (must be 1001234-SC-02 or earlier). Purion H+ variants require firmware update 4.3B for 1001234 integration.