CMP Slurry Distribution System

Name: CMP Slurry Distribution System
Brand: Various

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for CMP Slurry Distribution System moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used CMP Slurry Distribution System cost in 2026?

Pricing for used CMP Slurry Distribution System units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used CMP Slurry Distribution System from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

CMP Slurry Distribution System Specifications and Compatible Tools

Key specs: 0.1–5.0 LPM flow rate, 0.1–10 psi pressure control, ±0.5°C temperature stability, and 5–20 µm particle filtration. Compatible with:

Applied Materials Mirra 300 (2012–2018)
Ebara FCP-5000 (2015–2020)
Hitachi HM-4000 (2010–2016)
Warning: Do not install on tools using Part #CMP-DS-220A; this model lacks the 316L stainless-steel manifold required for abrasive slurries. Confirm OEM documentation for your specific tool’s slurry line diameter (common: 1/4" or 3/8" ID).

What to Check Before Buying a Used CMP Slurry Distribution System in 2026

Nozzle wear: Measure orifice diameter with a micrometer; reject if >0.1 mm erosion from original spec (typically 0.5–1.2 mm).
Flow consistency: Use a calibrated flow meter (e.g., Brooks SLA-1000) to verify ±2% deviation across full range.
Corrosion: Inspect internal channels with a borescope; reject systems with pitting >50 µm deep in contact zones.
Pump lifespan: Check total operating hours (via PLC logs); pumps >40,000 hours require rebuild.
Seal integrity: Perform a 24-hour pressure hold test at 8 psi; leaks >0.1 psi/hour invalidate warranty.

FAQ

Q: Used vs. refurbished CMP slurry systems—what’s the difference?
A: Used systems are resold as-is; refurbished units undergo full disassembly, component testing, and OEM-spec replacement of wear parts (nozzles, seals, pumps).

Q: Will this system work with my Tokyo Electron Polaris-CMP?
A: No. Tokyo Electron uses proprietary slurry delivery modules (Part #TE-CMP-DS4); cross-compatibility is not supported.

Q: How to test for slurry contamination risk?
A: Request a recent ICP-MS report for the system’s storage tank; acceptable particulate levels are <10 ppm for 20–100 nm nodes.

Q: Can I upgrade an old system for Cu CMP?
A: Yes, if it accepts 316L stainless-steel wetted parts and has pH 2–10 tolerance.