Various
Used Etch System — Plasma Etch Equipment
Various
Used Etch System — Plasma Etch Equipment
Market Price
→ Stable$15K–$600K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used Etch System — Plasma Etch Equipment
Price history and market activity data is being compiled.
How much does a used Used Etch System — Plasma Etch Equipment cost in 2026?
A used Used Etch System — Plasma Etch Equipment from Various typically sells for $15k – $600k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various Systems & Tools vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Etch System — Plasma Etch Equipment from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Used Etch System Cost in 2026?
Used etch systems (150–300mm) priced between $500,000–$1.2M in 2026, depending on OEM and condition. Refurbished units (with RF power supply and gas manifold upgrades) range from $750,000–$1.5M. This represents 40–60% savings versus new systems from Lam Research or Applied Materials. Systems with <5 years since last maintenance and <10k process cycles command 20% higher premiums. Note: Systems lacking ISO 14644-1 Class 5 cleanroom compliance may require costly retrofits, adding $50k–$100k to total cost.
Etch System Specifications and Compatible Tools
Key specs: 5–20 kW RF power, 1–100 mTorr pressure range, 300mm chamber diameter, 10–100 sccm gas flow (Cl₂/CF₄/O₂), and 13.56 MHz RF frequency. Compatible with:
- Lam Research Centura DSiE (1998–2005)
- Applied Materials Reflexion XP (2000–2007)
- Tokyo Electron LEAN Profile (2002–2006)
Exclusion: Not compatible with ASML NXT:1700 (2015) due to incompatible vacuum integration protocols. Verify I/O pinout (IEEE 488.2) and gas delivery interface (3/8” VCR) before purchase.
What to Check Before Buying a Used Etch System in 2026
- Chamber wall erosion: Use profilometry to confirm thickness >2mm; reject if p
Recent Market Listings
Updated May 19$12,750
As-is$190,500
Used$424,500
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $12,750 | As-is | May 12, 2026 |
| Ask | $190,500 | Used | May 5, 2026 |
| Ask | $424,500 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $15K – $600K
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