Various
Used CVD System — Chemical Vapor Deposition
Various
Used CVD System — Chemical Vapor Deposition
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used CVD System — Chemical Vapor Deposition moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used CVD System — Chemical Vapor Deposition cost in 2026?
Pricing for used Used CVD System — Chemical Vapor Deposition units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various Systems & Tools vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used CVD System — Chemical Vapor Deposition from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
CVD System Specifications and Compatible Tools
Key specs: chamber pressure (10⁻³ to 100 mTorr), gas flow (up to 1000 sccm), temperature (200–1000°C), and power (10–50 kW). Compatible tools include Applied Materials Centura (1995–2005), Lam Research P5500 (2000–2010), and ASM AMAT PEALD (2010–2018). Avoid using parts from Tokyo Electron Lambda Flex (TELF) systems (model TE-300) due to incompatible gas manifold threading (1/4"-28 NPT vs. 1/4"-18 ISO). Verify thermal sensor calibration for 3σ < 5°C uniformity across wafer surfaces.
What to Check Before Buying a Used CVD System in 2026
- Reactor chamber integrity: Use a 5MP borescope to inspect for cracks or erosion; reject if wall thickness < 90% of OEM spec.
- Gas delivery accuracy: Test mass flow controllers (MFCs) with a 0–100% ramp; ±2% deviation is acceptable.
- Heating element lifespan: Check thermocouple logs; replace if >10,000 heat cycles or >15% resistance drift.
- Vacuum pump performance: Measure base pressure with a Pfeiffer Baratron; >1×10⁻⁵ Torr rejects the unit.
- Software compatibility: Confirm recipe controllers support SEMI E148 (2025 revision) for 300mm tool integration.
FAQ
Q: What’s the difference between CVD and PVD systems?
A: CVD uses gas-phase reactions for conformal films (e.g., SiO₂), while PVD (sputtering) deposits materials via physical vaporization (e.g., metals).
Q: Can I retrofit a legacy CVD system for 300mm wafers?
A: Only if it has a redesigned susceptor with active cooling and upgraded gas injectors (check for 150mm-to
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