Lam Research 716-094231-001 Upper Electrode Assembly — Used
Lam Research 716-094231-001 Upper Electrode Assembly — Used
Market Price
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Request Quote →Last verified: 2026-05-11
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for Lam Research 716-094231-001 Upper Electrode Assembly — Used moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Lam Research 716-094231-001 Upper Electrode Assembly — Used cost in 2026?
Pricing for used Lam Research 716-094231-001 Upper Electrode Assembly — Used units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Electrode vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 716-094231-001 Upper Electrode Assembly — Used from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Lam Research 716-094231-001 Specifications and Compatible Tools
This silicon carbide (SiC) upper electrode assembly operates at 2,000–3,000W RF power, 13.56MHz, and 3–5kV DC bias. Dimensions: 310mm OD × 55mm H. Compatible with:
- Lam 2300 Versys MXE (2004–2012 production)
- Lam Kiyo XE (2008–2014)
- Lam Alliance EXE (2001–2007)
Exclusion: Not compatible with Lam Centura platforms using part number 716-094231-002 (different RF port configuration). Verify tool’s RF matching network before installation.
What to Check Before Buying a Used Lam 716-094231-001 in 2026
- Surface erosion: Use a 3D profilometer to measure SiC layer thickness. Reject if erosion exceeds 0.3mm (15% of nominal 2.0mm).
- RF continuity: Test with a vector network analyzer (VNA) at 13.56MHz. Return loss must be <–20dB across 1–50MHz.
- Ceramic insulator cracks: Inspect under UV light for microfractures; reject any with >3 cracks in plasma-facing zones.
- Thermal cycling history: Request tool logs. Electrodes with >1,200 cycles (typical lifespan) risk delamination.
- Coating uniformity: Use eddy current testing for SiC coating voids. Reject if >5% surface area shows discontinuities.
FAQ
Q: Is used Lam 716-094231-001 as reliable as new?
A: Yes, if erosion is <15% and SiC coating passes eddy current testing. Refurbished units with OEM recoating match new performance.
Q: Will this fit a Lam 2300 Versys MXE manufactured in 2005?
A: Yes. Confirmed compatibility with 2004–20
Recent Market Listings
Updated Sep 30No recent market activity for Lam Research 716-094231-001 Upper Electrode Assembly — Used.
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