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Lam Research 853-076312-001 Dielectric Ring — Used

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Lam Research 853-076312-001 Dielectric Ring — Used

Market Price

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Available by Request

Last verified: 2026-05-11

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Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Lam Research 853-076312-001 Dielectric Ring — Used moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

How much does a used Lam Research 853-076312-001 Dielectric Ring — Used cost in 2026?

Pricing for used Lam Research 853-076312-001 Dielectric Ring — Used units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Chamber Components vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Lam Research 853-076312-001 Dielectric Ring — Used from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

Lam 853-076312-001 Specifications and Compatible Tools

  • Material: Fused silica (quartz), 99.99% purity
  • Dimensions: 220 mm OD × 150 mm ID × 35 mm H
  • RF Rating: 1,600 W continuous, 13.56 MHz
  • Temp Range: -20°C to 300°C
  • Compatible Tools:
    • Lam 2300 Versys (2003–2012)
    • Lam Kiyo FXE 5500 (2008–2015)
    • Lam Alliance 550 (2001–2009)
      Exclusion: Not compatible with Lam Flex Series using part 853-076312-002 (differs by 2.5 mm thickness).

What to Check Before Buying a Used Lam 853-076312-001 in 2026

  1. Crack inspection: Use UV light (365 nm) to detect microfissures; reject if >3 surface flaws per 100 cm².
  2. Thickness tolerance: Measure with digital caliper (0.001” res); must be 35.0 ±0.2 mm.
  3. RF leakage test: Use

Recent Market Listings

Updated Sep 30

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Related Parts

Quick Info

ConditionUsed
CategoryChamber Components

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