Lam Research 853-076312-001 Dielectric Ring — Used
Lam Research 853-076312-001 Dielectric Ring — Used
Market Price
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Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-11
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Market Data
Coming Soon for Lam Research 853-076312-001 Dielectric Ring — Used
Price history and market activity data is being compiled.
How much does a used Lam Research 853-076312-001 Dielectric Ring — Used cost in 2026?
Pricing for used Lam Research 853-076312-001 Dielectric Ring — Used units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 50-70%. Get a quote.
Used Chamber Components vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Lam Research 853-076312-001 Dielectric Ring — Used from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Lam 853-076312-001 Cost in 2026?
Used units: Contact for pricing (typically $2,500–$4,000). Refurbished: $5,000–$6,500. New parts remain above $10,000. Used saves 60–75% vs new; refurbished saves 35–45%. Caveat: Parts with >100 etch cycles or pre-2018 manufacture often show RF leakage >1.5 dB at 13.56 MHz, disqualifying them for high-density plasma tools. Always request cycle count and chamber log data.
Lam 853-076312-001 Specifications and Compatible Tools
- Material: Fused silica (quartz), 99.99% purity
- Dimensions: 220 mm OD × 150 mm ID × 35 mm H
- RF Rating: 1,600 W continuous, 13.56 MHz
- Temp Range: -20°C to 300°C
- Compatible Tools:
- Lam 2300 Versys (2003–2012)
- Lam Kiyo FXE 5500 (2008–2015)
- Lam Alliance 550 (2001–2009)
Exclusion: Not compatible with Lam Flex Series using part 853-076312-002 (differs by 2.5 mm thickness).
What to Check Before Buying a Used Lam 853-076312-001 in 2026
- Crack inspection: Use UV light (365 nm) to detect microfissures; reject if >3 surface flaws per 100 cm².
- Thickness tolerance: Measure with digital caliper (0.001” res); must be 35.0 ±0.2 mm.
- RF leakage test: Use
Recent Market Listings
Updated May 19No recent market activity for Lam Research 853-076312-001 Dielectric Ring — Used.
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