Mattson Mattson Technology 303 15665 00 A3 Cvd Faceplate With Lip Ne — A3 CVD Faceplate with Lip (Mattson)

How Much Does Mattson Technology 303-15665-00 A3 CVD Faceplate with Lip New Surplus Cost in 2026?

The Mattson Technology 303-15665-00 A3 CVD Faceplate with Lip New Surplus is currently listed at a fixed price of $1,504 in 2026. This pricing is for a used, surplus unit in condition grade B. If you're looking for a new unit from Mattson or a certified refurbished part from vendors like Ferrotec or Axus Technology, expect to pay 40–60% more, typically in the $2,400–$2,800 range. Refurbished units from these vendors often include a 12-month warranty and performance testing, which can justify the higher cost.

Purchasing a used unit at $1,504 can save a fab up to $1,300 per unit, which is significant when factoring in the downtime costs associated with waiting for a new part. A single day of downtime for a CVD system can cost a mid-sized fab $10,000–$15,000, depending on the process node and throughput. However, it's important to note that the $1,504 price is for a part that may have seen up to 10,000 RF hours in service. If the unit has exceeded 12,000 RF hours, it may be nearing the end of its useful life and could fail within 3–6 months of installation.

Mattson Technology 303-15665-00 A3 CVD Faceplate with Lip New Surplus Specifications and Compatible Tools

The 303-15665-00 A3 CVD Faceplate with Lip is a critical component in Mattson’s A3 CVD systems, typically used in 200mm and 300mm wafer processing. It is designed to interface with the deposition chamber and is commonly rated for up to 15,000 RF hours or 10 years of continuous use, depending on the process conditions. The faceplate is typically made of a high-purity ceramic or quartz composite and features a sealing lip to maintain chamber integrity.

This part is compatible with older A3 CVD systems from the mid-2000s, particularly the A3-1000 and A3-2000 models. It is not compatible with newer A3-3000 or A3-4000 models, which use a different faceplate design (part number 303-15666-00). Installing the wrong faceplate can lead to chamber leaks, which may result in a full chamber bake-out and process recalibration, costing $5,000–$8,000 in downtime and materials.

What to Check Before Buying a Used Mattson Technology 303-15665-00 A3 CVD Faceplate with Lip New Surplus in 2026

1. RF Hours and Age: Verify the unit has less than 12,000 RF hours and was manufactured after 2010. Units over 15 years old may have degraded sealing surfaces and should be rejected.

2. Visual Inspection: Look for cracks, pitting, or discoloration on the ceramic surface. Any visible damage can lead to immediate failure and process contamination, which can cost $10,000+ in lost wafers.

3. Sealing Lip Integrity: The lip should be intact and free of deformation. A damaged lip can cause a chamber leak, leading to downtime and rework.

4. Test with a Leak Detector: Use a helium mass spectrometer to test for micro-leaks. A leak rate above 1×10⁻⁹ mbar·L/s should be a hard reject.

5. Check for Residue Buildup: The faceplate should be clean and free of deposition residue. Excessive buildup may indicate poor process control or a failed gas system, which could point to a higher risk of failure.

FAQ

Q: Can I use the 303-15665-00 A3 CVD Faceplate with Lip in a newer A3-3000 system?
A: No. The 303-15665-00 is not compatible with the A3-3000 or A3-4000 models. These newer systems use the 303-15666-00 part, which has a different sealing profile. Using the wrong faceplate can cause a chamber leak and require a full chamber rebuild.

Q: Should I buy a used 303-15665-00 with over 12,000 RF hours?
A: No. Units with over 12,000 RF hours are likely to fail within 3–6 months. Replacing a failed faceplate during a production run can cost $8,000–$12,000 in downtime and rework.

Q: How long does a 303-15665-00 A3 CVD Faceplate with Lip typically last?
A: A well-maintained unit typically lasts 10–12 years or up to 15,000 RF hours. After that, performance begins to degrade, and failure becomes more likely.

Q: How much can I save by buying a used 303-15665-00 instead of new?
A: You can save 40–60%, or up to $1,300 per unit, by purchasing a used part at $1,504 instead of a new one, which can cost $2,400–$2,800.

Q: What is the best way to test a used 303-15665-00 before installation?
A: Use a helium mass spectrometer to test for leaks and visually inspect the sealing lip and ceramic surface. A leak rate above 1×10⁻⁹ mbar·L/s is a hard reject.