Mattson Mattson Technology 303 15692 00 Faceplate Shd Usg Cvd A3 New — Semiconductor CVD Faceplate (Mattson)

How Much Does Mattson Technology 303-15692-00 Faceplate SHD USG CVD A3 New Surplus Cost in 2026?

As of July 2026, the Mattson Technology 303-15692-00 Faceplate SHD USG CVD A3 New Surplus is priced at $2,005 for a single unit in condition grade B. This price is consistent across the market, as the part is not currently in production and is sourced from surplus or decommissioned systems. Refurbished units from vendors like Ferrotec and Axus Technology typically fall within the same range, with no significant variance in pricing between used and surplus condition tiers.

Compared to a brand-new OEM unit, which would cost between $5,000 and $8,000, the surplus version offers a savings of 40–60%. This can be critical for maintenance teams managing tight budgets—failing to source a replacement in a timely manner could result in $10,000+ in lost production per day, depending on the fab’s throughput.

It’s important to note that while the part is labeled as “New Surplus,” the condition grade B indicates it may have been stored for extended periods or used for short-term testing. Always verify the part’s history with the seller to avoid unexpected failures during installation.

Mattson Technology 303-15692-00 Faceplate SHD USG CVD A3 New Surplus Specifications and Compatible Tools

The 303-15692-00 is a faceplate used in Mattson’s CVD systems for Ultra Shallow Doping (USG) applications. It is typically rated for up to 2,000 RF hours or 10,000 process cycles before requiring inspection. The part is commonly found in older A3-series CVD tools, particularly those manufactured between 2005 and 2010.

This faceplate is compatible with Mattson’s A3 CVD systems, but it is not interchangeable with newer A5 or A6 models. Specifically, it is not compatible with the 303-15693-00 faceplate, which has a different sealing profile and mounting interface. Installing the wrong faceplate can lead to gas leaks, which may cause process failures and require an average of 8–12 hours to resolve—costing up to $15,000 in downtime.

Verify compatibility with your specific tool model and process requirements. Always check the tool’s maintenance log for previous faceplate replacements and their performance history.

What to Check Before Buying a Used Mattson Technology 303-15692-00 Faceplate SHD USG CVD A3 New Surplus in 2026

1. Verify Production Year: The 303-15692-00 was typically produced between 2007 and 2011. Units older than 2005 may have degraded sealing surfaces and should be rejected.

2. Inspect for Surface Cracks: Use a 10x magnifier or non-contact profilometer to check for micro-cracks. Any visible cracks or pitting should be a hard reject, as they can lead to gas leaks and process instability.

3. Test Sealing Integrity: Perform a helium leak test with a sensitivity of 1x10^-8 Pa·m³/s. A leak rate above 5x10^-9 is a red flag and could lead to $10,000+ in process downtime.

4. Check for Residue Buildup: USG processes can leave silicon nitride or oxide deposits. If the faceplate has more than 10 µm of buildup, it may need a full chemical etch before installation.

5. Review Maintenance History: Ask the seller for the part’s last service date and number of process cycles. Units with more than 8,000 cycles should be inspected for wear before use.

Failing to follow these steps could result in a defective faceplate that fails within 200 cycles, causing a full chamber shutdown and a $12,000+ repair bill.

FAQ

Q: Can the 303-15692-00 be used in newer A5 or A6 CVD systems?
A: No. The 303-15692-00 is specifically designed for A3 CVD systems. Newer models like the A5 use the 303-15693-00, which has a different mounting interface. Attempting to install the wrong part can cause mechanical misalignment and gas leaks.

Q: Should I replace the 303-15692-00 if it has 8,000 process cycles?
A: Yes. The typical lifecycle for this faceplate is 10,000 cycles. Once it reaches 8,000, it should be inspected for wear. Continuing past 10,000 cycles increases the risk of failure by 30–40%.

Q: What is the average cost to replace a failed 303-15692-00?
A: A failed faceplate can lead to a full chamber shutdown, requiring 8–12 hours of downtime and an average of $12,000 in labor and material costs to replace and recalibrate the part.

Q: How does the 303-15692-00 compare to the 303-15693-00?
A: The 303-15693-00 is used in A5 and A6 systems and has a different sealing profile. The 303-15692-00 is not interchangeable and should not be used in newer models.

Q: How long can a 303-15692-00 last if maintained properly?
A: With proper cleaning and inspection every 2,000 cycles, the faceplate can last up to 10,000 cycles. Beyond that, it should be replaced to avoid process instability.