MKS Instruments 1179B-63C-30L Mass Flow Controller (MFC) — Used
MKS Instruments 1179B-63C-30L Mass Flow Controller (MFC) — Used
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-11
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for MKS Instruments 1179B-63C-30L Mass Flow Controller (MFC) — Used moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used MKS Instruments 1179B-63C-30L Mass Flow Controller (MFC) — Used cost in 2026?
Pricing for used MKS Instruments 1179B-63C-30L Mass Flow Controller (MFC) — Used units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Gas Control / MFC vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used MKS Instruments 1179B-63C-30L Mass Flow Controller (MFC) — Used from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
MKS Instruments 1179B-63C-30L Specifications and Compatible Tools
- Flow Range: 0–30 SLPM
- Voltage: 12–30V DC
- Frequency: 4–20 mA output
- Accuracy: ±1.0% of setpoint
- Response Time: <1.5 seconds
Compatible with:
- AMAT Centura (1998–2003)
- Lam Research P5 (2000–2005)
- TEL Pulsar (1999–2002)
- Hitachi HCP-4000 (2001–2004)
Exclusion: Not compatible with Applied Materials’ Endura models using part number 1179B-63C-50L due to higher flow requirements. Verify tool’s maximum allowable pressure drop (MAD) before installation.
What to Check Before Buying a Used MKS Instruments 1179B-63C-30L in 2026
- Calibration Certificate: Must show validation within 12 months; units older than 24 months risk ±2% drift.
- Voltage Test: Use a multimeter to confirm output stability (11.5–31V DC); deviations >5% indicate sensor decay.
- Diaphragm Inspection: Measure thickness with a micrometer; wear >0.05mm correlates with 15% flow in
Recent Market Listings
Updated Sep 30No recent market activity for MKS Instruments 1179B-63C-30L Mass Flow Controller (MFC) — Used.
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