27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems)

Name: 27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems)
Brand: Novellus Systems
SKU: 27-174892-00

Part No. 27-174892-00

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems) cost in 2026?

Pricing for used 27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Novellus Systems Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

27-174892-00 Specifications and Compatible Tools

This lid assembly operates at 1–10 Torr pressure, rated for 300°C max temperature. Constructed from 316L stainless steel with boron nitride-coated seals. Compatible with Novellus SPEED 5000/7000 (2010–2018) and Lam Research SPEED 1200 (post-2015 acquisition). Do not install on tools using part 27-174894-00, which requires a different O-ring configuration. Verify gas compatibility for WF6, SiH4, and NH3 processes. Seal life expectancy is ~25,000 cycles; exceeding this without replacement risks particle contamination. Cross-check tool serial numbers against Novellus’ 2016 revision update (Rev C) to avoid misalignment with older chamber designs.

What to Check Before Buying a Used 27-174892-00 in 2026

Seal Groove Wear: Measure O-ring channel depth with a digital caliper. Reject if <0.2mm below OEM spec (1.8mm).
Corrosion Inspection: Use a 10x loupe to check for pitting on internal surfaces. Reject units with >3 pitting clusters per 10cm².
Leak Test: Perform a helium mass spectrometer test at 5 Torr. Accept only units with <1x10⁻⁶ mbar·L/s leakage.
Cycle Count: Cross-reference PM logs. Units with >30,000 cycles require seal replacement (part 27-174893-01).
Last Maintenance Date: Avoid units serviced before 2022 without full refurbishment records.

Q: Is a used 27-174892-00 better than a refurbished one for 2026?
A: Used parts save 50–70% but require inspection for seal wear. Refurbished units include new seals and certificates of compliance, reducing risk.