27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems)

Name: 27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems)
Brand: Novellus Systems
SKU: 27-174892-00
Price: 100 USD
Availability: InStock

Part No. 27-174892-00

Market Price

→ Stable

2 active listings

From $100

Typical secondary market pricing · USD

Low $100Avg $100High $100

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $100 – $100

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used 27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems) cost in 2026?

A used 27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems) from Novellus Systems typically sells for $100 – $100 on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Novellus Systems Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 27-174892-00 — SPEED CVD Process Kit, Lid Assembly (Novellus Systems) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 27-174892-00 Cost in 2026?

Used units in 2026 range from $4,500–$7,200, depending on cycle count and seal integrity. Refurbished variants with OEM-verified seals and <20,000 deposition cycles average $8,000–$9,500. New OEM pricing remains undisclosed but used parts save 50–70% versus list. Units with >40,000 RF-hours often show O-ring degradation, increasing risk of gas leaks. Always verify cycle count via tool logs or PM history. Refurbished units include replaced boron nitride seals (part 27-174893-01) and pressure-rated gaskets. Sourcing through brokers with 2026 inventory data ensures competitive pricing, but lead times extend 2–4 weeks post-verification.

27-174892-00 Specifications and Compatible Tools

This lid assembly operates at 1–10 Torr pressure, rated for 300°C max temperature. Constructed from 316L stainless steel with boron nitride-coated seals. Compatible with Novellus SPEED 5000/7000 (2010–2018) and Lam Research SPEED 1200 (post-2015 acquisition). Do not install on tools using part 27-174894-00, which requires a different O-ring configuration. Verify gas compatibility for WF6, SiH4, and NH3 processes. Seal life expectancy is ~25,000 cycles; exceeding this without replacement risks particle contamination. Cross-check tool serial numbers against Novellus’ 2016 revision update (Rev C) to avoid misalignment with older chamber designs.

What to Check Before Buying a Used 27-174892-00 in 2026

Seal Groove Wear: Measure O-ring channel depth with a digital caliper. Reject if <0.2mm below OEM spec (1.8mm).
Corrosion Inspection: Use a 10x loupe to check for pitting on internal surfaces. Reject units with >3 pitting clusters per 10cm².
Leak Test: Perform a helium mass spectrometer test at 5 Torr. Accept only units with <1x10⁻⁶ mbar·L/s leakage.
Cycle Count: Cross-reference PM logs. Units with >30,000 cycles require seal replacement (part 27-174893-01).
Last Maintenance Date: Avoid units serviced before 2022 without full refurbishment records.

Q: Is a used 27-174892-00 better than a refurbished one for 2026?
A: Used parts save 50–70% but require inspection for seal wear. Refurbished units include new seals and certificates of compliance, reducing risk.

Q: Can this lid assembly fit a Lam SPEED 1200 from 2014?
A