Pfeiffer Vacuum
PM 061 570 T — HiPace 300 Turbomolecular Pump (Pfeiffer Vacuum)
Pfeiffer Vacuum
PM 061 570 T — HiPace 300 Turbomolecular Pump (Pfeiffer Vacuum)
Part No. PM 061 570 T
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-16
Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for PM 061 570 T — HiPace 300 Turbomolecular Pump (Pfeiffer Vacuum) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used PM 061 570 T — HiPace 300 Turbomolecular Pump (Pfeiffer Vacuum) cost in 2026?
Pricing for used PM 061 570 T — HiPace 300 Turbomolecular Pump (Pfeiffer Vacuum) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Pfeiffer Vacuum Parts & Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used PM 061 570 T — HiPace 300 Turbomolecular Pump (Pfeiffer Vacuum) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
PM 061 570 T Specifications and Compatible Tools
Key specs: 2.4 kW power, 230V/400V, 50–60 Hz, 300 l/s pumping speed at 1×10⁻³ mbar, max 70,000 RPM. Compatible with:
- Applied Materials Centura (1998–2005)
- Lam Research 2300 (2000–2007)
- Veeco Nexus 300 (2001–2006)
Warning: PM 061 570 T is not compatible with PM 061 571 T control modules due to differing rotor feedback protocols. Verify the 14-pin connector (part 821 035) matches your system.
What to Check Before Buying a Used PM 061 570 T in 2026
- Rotor runout: Measure with a dial indicator; >0.05 mm indicates rotor damage.
- Bearing wear: Check for oil contamination in the forepump (Pfeiffer 821 045) and bearing housing scoring.
- Pumpdown time: Full vacuum (1×10⁻³ mbar) should take <30 minutes; >45 minutes suggests rotor imbalance.
- Motor insulation resistance: Test with a megohmmeter; <100 MΩ requires rewinding.
- RF-hours: Units with >40,000 hours may have degraded carbon bearings; request maintenance logs.
FAQ
Q: Is PM 061 570 T compatible with newer CVD tools?
A: No. Modern CVDs (e.g., ASM E4000) use digital feedback systems incompatible with the analog PM 061 570 T controller.
Q: Used vs. refurbished – which is better?
A: Refurbished units (with 2026-era capacitors and bearings) last 2–3x longer than used. Avoid "rebuild" claims without proof of rotor balancing.
Q: How to verify the pump’s RF-hours?
A: Check the controller’s memory chip (part 821 036). If missing, request a vibration analysis to estimate bearing wear.
Q: What’s the lead time for 2026?
A: 2–4 weeks after sourcing, but delays occur if rotor replacement is needed. Order bearings (Pfeiffer 821 040) in parallel.
Recent Market Listings
Updated Sep 30No recent market activity for PM 061 570 T — HiPace 300 Turbomolecular Pump (Pfeiffer Vacuum).
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