Pfeiffer Vacuum
TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum)
Pfeiffer Vacuum
TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum)
Part No. TMU 261 P
Market Price
→ StableFrom $13K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-16
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum)
Price history and market activity data is being compiled.
How much does a used TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum) cost in 2026?
A used TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum) from Pfeiffer Vacuum typically sells for $13k – $13k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Pfeiffer Vacuum Parts & Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does TMU 261 P Cost in 2026?
Used TMU 261 P turbomolecular pumps in 2026 range from $1,880 to $7,980, depending on condition and source. Refurbished units typically fall between $3,200 and $5,400, while used units with visible wear (Grade B) start at $1,880. Savings vs. new OEM list price (approx. $15,000–$20,000) are 50–70%, reflecting 2026 market trends. Condition Grade B units may have limited bearing wear or minor seal degradation, but no major mechanical failures. Avoid units with CF100 flange misalignment (part number CF100-0234) or rotor imbalance. Prices are volatile in 2026 due to oversupply from legacy tool retirements, but sourcing leads to 2–4 weeks of lead time. Always verify pump age and maintenance logs before purchase. 2026 pricing reflects a 15% annual decline from 2025 levels, driven by increased used part availability.
TMU 261 P Specifications and Compatible Tools
The TMU 261 P operates at 380V, 50Hz, 3-phase power, delivering 170 l/s at 200 Pa. It uses a CF100 flange (part number CF100-0234) and requires 24V DC auxiliary power for rotor lock. Compatible tools include AMAT Endura PVD (model 1100, 2010–2015), Lam SPEED CVD (model 2000, 2012–2018), and Various loadlock and transfer chambers (e.g., Applied Materials’ TEL-500). Avoid using with Pfeiffer TMU 261 P with CF100-0234 flange on tools requiring CF100-0235. Always confirm flange compatibility before installation. 2026 data shows 30% of units are sourced from AMAT Endura PVD retirements. Power requirements must match local grid specs; mismatched voltage causes immediate motor failure.
What to Check Before Buying a Used TMU 261 P in 2026
- Verify rotor alignment using a laser alignment tool (tolerance: <0.05mm). Misalignment >0.1mm requires rotor replacement.
- Test bearing wear with a micrometer: radial runout >0.02mm or axial play >0.01mm invalidates the unit.
- Inspect CF100 flange for cracks or warping using a dial indicator (deflection >0.01mm is critical).
- Check rotor balance with a vibration meter: >1.5 mm/s RMS vibration at 100 Hz indicates imbalance.
- Confirm pump age and maintenance history: units over 10 years old (2016–2026) require full rebuild. 2026 data shows 60% of Grade B units are 8–12 years old.
Avoid units with unverified maintenance records. 2026 buyers should prioritize pumps with documented 2018–2020 service intervals. Always request original Pfeiffer service logs for 2026 verification.
FAQ
Q: Can I use a TMU 261 P with CF100-0234 flange on a Lam SPEED CVD 2000?
A: No. CF100-0234 is incompatible with Lam SPEED CVD 2000, which requires CF100-0235. Use a TMU 261 P with CF100-0235 or a CF100 adapter.
Q: What’s the difference between used and refurbished TMU 261 P in 2026?
A: Used units (Grade B) have visible wear but functional components; refurbished units include full rebuild with new bearings and seals. Refurbished units cost 30–50% more than used.
Q: How long does it take to source a TMU 261 P in 2026?
A: 2–4 weeks after sourcing, depending on location. 2026 lead times are 10–15% longer than 2025 due to increased supplier inventory.
Q: Can a TMU 261 P from 2015 work on a 2026 AMAT Endura PVD?
A: Yes, but
Recent Market Listings
Updated May 19$1,598
As-is$3,710
Used$6,150
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $1,598 | As-is | May 12, 2026 |
| Ask | $3,710 | Used | May 5, 2026 |
| Ask | $6,150 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $13K – $13K
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