TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum)

Name: TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum)
Brand: Pfeiffer Vacuum
SKU: TMU 261 P

Part No. TMU 261 P

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market price (estimated)

$1,999 to $2,110

4 listings · last checked Sep 11, 2026 · asking prices, not sold

Estimated from a small sample (4 listings); treat as indicative.

Source: ebay

Get an exact quote →parts@caladansemi.com

How much does a used TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum) cost in 2026?

Pricing for used TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Pfeiffer Vacuum Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used TMU 261 P — TMU 261 P Turbomolecular Pump, 170 l/s (Pfeiffer Vacuum) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

TMU 261 P Specifications and Compatible Tools

The TMU 261 P operates at 380V, 50Hz, 3-phase power, delivering 170 l/s at 200 Pa. It uses a CF100 flange (part number CF100-0234) and requires 24V DC auxiliary power for rotor lock. Compatible tools include AMAT Endura PVD (model 1100, 2010–2015), Lam SPEED CVD (model 2000, 2012–2018), and Various loadlock and transfer chambers (e.g., Applied Materials’ TEL-500). Avoid using with Pfeiffer TMU 261 P with CF100-0234 flange on tools requiring CF100-0235. Always confirm flange compatibility before installation. 2026 data shows 30% of units are sourced from AMAT Endura PVD retirements. Power requirements must match local grid specs; mismatched voltage causes immediate motor failure.

What to Check Before Buying a Used TMU 261 P in 2026

Verify rotor alignment using a laser alignment tool (tolerance: <0.05mm). Misalignment >0.1mm requires rotor replacement.
Test bearing wear with a micrometer: radial runout >0.02mm or axial play >0.01mm invalidates the unit.
Inspect CF100 flange for cracks or warping using a dial indicator (deflection >0.01mm is critical).
Check rotor balance with a vibration meter: >1.5 mm/s RMS vibration at 100 Hz indicates imbalance.
Confirm pump age and maintenance history: units over 10 years old (2016–2026) require full rebuild. 2026 data shows 60% of Grade B units are 8–12 years old.

Avoid units with unverified maintenance records. 2026 buyers should prioritize pumps with documented 2018–2020 service intervals. Always request original Pfeiffer service logs for 2026 verification.

FAQ

Q: Can I use a TMU 261 P with CF100-0234 flange on a Lam SPEED CVD 2000?
A: No. CF100-0234 is incompatible with Lam SPEED CVD 2000, which requires CF100-0235. Use a TMU 261 P with CF100-0235 or a CF100 adapter.

Q: What’s the difference between used and refurbished TMU 261 P in 2026?
A: Used units (Grade B) have visible wear but functional components; refurbished units include full rebuild with new bearings and seals. Refurbished units cost 30–50% more than used.

Q: How long does it take to source a TMU 261 P in 2026?
A: 2–4 weeks after sourcing, depending on location. 2026 lead times are 10–15% longer than 2025 due to increased supplier inventory.

Q: Can a TMU 261 P from 2015 work on a 2026 AMAT Endura PVD?
A: Yes, but