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Silicon Valley Group

859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group)

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Silicon Valley Group

859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group)

Name: 859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group)
Brand: Silicon Valley Group
SKU: 859-8001-001
Availability: InStock

Part No. 859-8001-001

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used 859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group) cost in 2026?

Pricing for used 859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group) units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 50-70%. Get a quote.

Used Silicon Valley Group Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 859-8001-001 Cost in 2026?

Used units for 859-8001-001 typically range from $1,200 to $1,800 in 2026, while refurbished models (with new seals and recalibration) cost $2,500–$3,000. New OEM units are priced at $6,500–$7,500, making used/refurbished options 50–70% cheaper. Units with >40,000 RF-hours may require seal replacement before deployment. Price variance depends on tool-specific wear (e.g., tip erosion from aggressive solvents) and calibration history. Refurbished assemblies include OEM-certified flow-rate validation, a critical factor for 193nm lithography tracks. Avoid sourcing units without a documented PM history, as clogging from photoresist residue is common in older batches. Always verify lead time with the seller, as 2026 demand for SVG 90-S parts remains steady due to legacy tool usage in 200mm wafer lines.

859-8001-001 Specifications and Compatible Tools

The 859-8001-001 features a 0.1–1.5 mL/min flow rate, PTFE-lined stainless steel construction, and a 1/4" OD nozzle tip. It operates at 24–36 VDC and supports photoresist viscosities up to 20 cP. Compatible tools include the SVG 90-S Coat/Develop Track (1998–2005 models) and SVG 8600 Series Track (rev A–C). Note: Do not install this nozzle on systems using part number 859-8002-003 manifolds without a 1/8" NPT adapter. Cross-check the dispense arm motor model (SVG 221-0102-001 vs. 221-0102-002) to confirm compatibility. Units produced after 2002 include a PTFE anti-static coating for photoresist compatibility. Always verify the OEM revision code on the nozzle body—older 859-8001-001 variants lack the 2002+ coating.

What to Check Before Buying a Used 859-8001-001 in 2026

Flow-rate accuracy: Use a calibrated syringe pump to verify ±5% deviation from spec (0.1–1.5 mL/min). Reject units with >10% variance.
Tip wear: Measure nozzle ID with a micrometer—replacement is needed if erosion exceeds 0.005" from original 0.020" spec.
Seal integrity: Perform a helium leak test at 15 psi; leaks >10 SCCM invalidate the unit.
Cycle count: Avoid nozzles with >50,000 dispense cycles, as seal fatigue increases failure risk.
OEM calibration: Ensure the unit has a 2023+ calibration certificate. Nozzles calibrated before 2020 may lack 193nm photoresist compatibility updates.

Q: Is 859-8001-001 the same as 859-8001-002?
A: No. 859-8001-002 has a 2.0 mL/min max flow rate and lacks the PTFE anti-static coating found in 2002+ revisions of 859-8001-001.

Q: Used vs. refurbished—what’s better?
A: Refurbished units include new