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Silicon Valley Group

859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group)

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Silicon Valley Group

859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group)

Name: 859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group)
Brand: Silicon Valley Group
SKU: 859-8001-001

Part No. 859-8001-001

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group) cost in 2026?

Pricing for used 859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Silicon Valley Group Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 859-8001-001 — Photoresist Dispense Nozzle Assembly, SVG 90-S (Silicon Valley Group) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

859-8001-001 Specifications and Compatible Tools

The 859-8001-001 features a 0.1–1.5 mL/min flow rate, PTFE-lined stainless steel construction, and a 1/4" OD nozzle tip. It operates at 24–36 VDC and supports photoresist viscosities up to 20 cP. Compatible tools include the SVG 90-S Coat/Develop Track (1998–2005 models) and SVG 8600 Series Track (rev A–C). Note: Do not install this nozzle on systems using part number 859-8002-003 manifolds without a 1/8" NPT adapter. Cross-check the dispense arm motor model (SVG 221-0102-001 vs. 221-0102-002) to confirm compatibility. Units produced after 2002 include a PTFE anti-static coating for photoresist compatibility. Always verify the OEM revision code on the nozzle body—older 859-8001-001 variants lack the 2002+ coating.

What to Check Before Buying a Used 859-8001-001 in 2026

Flow-rate accuracy: Use a calibrated syringe pump to verify ±5% deviation from spec (0.1–1.5 mL/min). Reject units with >10% variance.
Tip wear: Measure nozzle ID with a micrometer—replacement is needed if erosion exceeds 0.005" from original 0.020" spec.
Seal integrity: Perform a helium leak test at 15 psi; leaks >10 SCCM invalidate the unit.
Cycle count: Avoid nozzles with >50,000 dispense cycles, as seal fatigue increases failure risk.
OEM calibration: Ensure the unit has a 2023+ calibration certificate. Nozzles calibrated before 2020 may lack 193nm photoresist compatibility updates.

Q: Is 859-8001-001 the same as 859-8001-002?
A: No. 859-8001-002 has a 2.0 mL/min max flow rate and lacks the PTFE anti-static coating found in 2002+ revisions of 859-8001-001.

Q: Used vs. refurbished—what’s better?
A: Refurbished units include new