Used Anodized Aluminum (Al2O3) Chamber Liner

Name: Used Anodized Aluminum (Al2O3) Chamber Liner
Brand: Various
Price: 2550 USD
Availability: InStock

Market Price

→ Stable

$600–$5K

Typical secondary market pricing · USD

Low $600Avg $2,550High $4,500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $600 – $5K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Anodized Aluminum (Al2O3) Chamber Liner cost in 2026?

A used Used Anodized Aluminum (Al2O3) Chamber Liner from Various typically sells for $600 – $5k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Anodized Aluminum (Al2O3) Chamber Liner from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Anodized Aluminum (Al2O3) Chamber Liner Cost in 2026?

Used units typically range from $800 to $3,500 in 2026, depending on anodized layer thickness (0.002"–0.005") and tool compatibility. Refurbished options (with re-anodization and surface repair) cost $1,200–$4,000, saving 30–40% vs. new OEM pricing (~$5,000–$7,500). Savings drop to 20–25% for high-end models with custom dimensions. Caveat: Liners with anodized layer wear exceeding 20% of original thickness (measured via micrometer) may require recoating, adding $300–$600 to total cost.

Anodized Aluminum (Al2O3) Chamber Liner Specifications and Compatible Tools

Key specs: 6061-T6 aluminum base, 0.002"–0.005" hard-anodized Al₂O₃ layer, max operating temp 350°C, dimensions 18"–36" dia. × 12"–24" H. Compatible with:

Lam Research Centura P5000 (1998–2005)
Applied Materials Endpoint 5500 (2000–2008)
Veeco Nexus 700 (2002–2010)
Exclusion: Not compatible with Axcelis 200i (part #789-1234-5), which requires titanium liners due to plasma etch chemistries. Verify tool’s process gas profile before installation.

What to Check Before Buying a Used Anodized Aluminum (Al2O3) Chamber Liner in 2026

Anodized layer thickness: Use a digital micrometer to confirm ≥0.003" (reject if <0.002").
Surface cracks: Perform dye penetrant test; reject parts with cracks >0.010" in high-stress zones.
Dimensional tolerance: Measure ID/Od with calipers; deviations >±0.005" may cause sealing failures.
Pitting corrosion: Inspect under 10× magnifier; pitting depth >0.001" requires media blasting.
Service history: Reject parts with >10,000 process cycles without re-anodization (per SEMI E14 guideline).

FAQ

Q: Used vs. refurbished anodized liners—what’s the difference?
A: Used parts are resold as-is; refurbished units include re-anodization, surface polishing, and leak testing.

Q: How to test anodized layer integrity?
A: Use a digital micrometer for thickness and a salt spray test (ASTM B117) for 48 hrs to check corrosion resistance.

Q: Compatible with plasma etch tools?
A: Yes, but avoid fluorine-based chemistries (>20% F₂) which accelerate Al₂O₃ degradation.

Q: Lifespan expectation?
A: 5–8 years in deposition tools; 2–4 years in aggressive etch environments without rework.