Used Anodized Aluminum (Al2O3) Chamber Liner

Name: Used Anodized Aluminum (Al2O3) Chamber Liner
Brand: Various

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Anodized Aluminum (Al2O3) Chamber Liner moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Anodized Aluminum (Al2O3) Chamber Liner cost in 2026?

Pricing for used Used Anodized Aluminum (Al2O3) Chamber Liner units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Anodized Aluminum (Al2O3) Chamber Liner from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Anodized Aluminum (Al2O3) Chamber Liner Specifications and Compatible Tools

Key specs: 6061-T6 aluminum base, 0.002"–0.005" hard-anodized Al₂O₃ layer, max operating temp 350°C, dimensions 18"–36" dia. × 12"–24" H. Compatible with:

Lam Research Centura P5000 (1998–2005)
Applied Materials Endpoint 5500 (2000–2008)
Veeco Nexus 700 (2002–2010)
Exclusion: Not compatible with Axcelis 200i (part #789-1234-5), which requires titanium liners due to plasma etch chemistries. Verify tool’s process gas profile before installation.

What to Check Before Buying a Used Anodized Aluminum (Al2O3) Chamber Liner in 2026

Anodized layer thickness: Use a digital micrometer to confirm ≥0.003" (reject if <0.002").
Surface cracks: Perform dye penetrant test; reject parts with cracks >0.010" in high-stress zones.
Dimensional tolerance: Measure ID/Od with calipers; deviations >±0.005" may cause sealing failures.
Pitting corrosion: Inspect under 10× magnifier; pitting depth >0.001" requires media blasting.
Service history: Reject parts with >10,000 process cycles without re-anodization (per SEMI E14 guideline).

FAQ

Q: Used vs. refurbished anodized liners—what’s the difference?
A: Used parts are resold as-is; refurbished units include re-anodization, surface polishing, and leak testing.

Q: How to test anodized layer integrity?
A: Use a digital micrometer for thickness and a salt spray test (ASTM B117) for 48 hrs to check corrosion resistance.

Q: Compatible with plasma etch tools?
A: Yes, but avoid fluorine-based chemistries (>20% F₂) which accelerate Al₂O₃ degradation.

Q: Lifespan expectation?
A: 5–8 years in deposition tools; 2–4 years in aggressive etch environments without rework.