Various
Used Aluminum Chamber Liner
Various
Used Aluminum Chamber Liner
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Aluminum Chamber Liner moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Aluminum Chamber Liner cost in 2026?
Pricing for used Used Aluminum Chamber Liner units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Aluminum Chamber Liner from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Used Aluminum Chamber Liner Specifications and Compatible Tools
- Key specs: 6061-T6 aluminum, 0.25–0.5" thickness, 120–250°F operating range, Ra 16–32µin surface finish
- Compatible tools:
- Applied Materials Centura (1998–2005)
- Lam Research Endura (2000–2008)
- ASM EpiCore (1995–2002)
- Exclusion: Not compatible with Tegal T500 (part #TG-CHL-01) due to 3.5" port offset vs standard 2.75".
What to Check Before Buying a Used Aluminum Chamber Liner in 2026
- Pitting depth: Use a micrometer to confirm no pits exceed 0.01" below nominal thickness.
- Thickness tolerance: Measure at 4+ points with a digital caliper; reject if <0.2" original spec.
- Surface integrity: Test with a profilometer; Ra >32µin indicates excessive wear.
- Thermal fatigue cracks: Inspect with dye penetrant; reject parts with >3 cracks in active zones.
- Lifespan: Avoid liners from tools with >15,000 process cycles (per SEMI E142-08).
FAQ
Q: How to clean a used aluminum chamber liner?
A: Use ISO 14644-1 Class 7-compatible solvents; avoid abrasives that exceed Ra 16µin.
Q: Used vs refurbished aluminum liners—what’s the difference?
A: Refurbished units include resurfacing (Ra ≤16µin) and leak testing at 15 psi N₂.
Q: Can I use a 0.25" liner in a tool spec’d for 0.3"?
A: No—thickness <90
Recent Market Listings
Updated Sep 30No recent market activity for Used Aluminum Chamber Liner.
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