Various (AMAT, Lam)
Used Aluminum Showerhead for Etch Chamber
Various (AMAT, Lam)
Used Aluminum Showerhead for Etch Chamber
Market Price
→ Stable$1K–$8K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used Aluminum Showerhead for Etch Chamber
Price history and market activity data is being compiled.
How much does a used Used Aluminum Showerhead for Etch Chamber cost in 2026?
A used Used Aluminum Showerhead for Etch Chamber from Various (AMAT, Lam) typically sells for $1k – $8k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various (AMAT, Lam) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Aluminum Showerhead for Etch Chamber from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used Aluminum Showerhead for Etch Chamber Cost in 2026?
Used units range from $1,200 to $9,500 in 2026, depending on OEM (AMAT vs. Lam), port count (48–128), and cycle history. Refurbished options add $1,300–$3,000 for recoating and flow calibration. These prices save 40–60% vs. new (which average $15,000–$25,000). Caveat: Reject parts with >15,000 process cycles without full teardown inspection—aluminum fatigue cracks above 0.1mm in thickness are common beyond this threshold.
Aluminum Showerhead Specifications and Compatible Tools
Key specs: Aluminum 6061-T6 body, 48–128 gas ports (0.8–1.5mm diameter), max pressure 50 psig, and voltage rating <300V DC. Compatible tools include:
- AMAT Centura 5500 (2000–2010)
- Lam P5 Etch (2005–2012)
- Tokyo Electron LEANIX (2008–2015)
Exclusion: Not compatible with Applied Materials’ Reflexion XPiE (part # 654-321-01) due to non-matching port spacing (0.3mm offset). Verify chamber ID dimensions before purchase.
What to Check Before Buying a Used Aluminum Showerhead in 2026
- Pitting inspection: Use a micrometer to measure wall thickness. Reject if <3.2mm (original spec
Recent Market Listings
Updated May 19$850
As-is$3,100
Used$5,900
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $850 | As-is | May 12, 2026 |
| Ask | $3,100 | Used | May 5, 2026 |
| Ask | $5,900 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $1K – $8K
Response within 4 hours. Export compliance handled.
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