Used Quartz Showerhead / Gas Distribution Plate

Name: Used Quartz Showerhead / Gas Distribution Plate
Brand: Various (AMAT, Lam)

Market Price

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Available by Request

Last verified: 2026-05-11

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Quartz Showerhead / Gas Distribution Plate moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Quartz Showerhead / Gas Distribution Plate cost in 2026?

Pricing for used Used Quartz Showerhead / Gas Distribution Plate units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (AMAT, Lam) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Quartz Showerhead / Gas Distribution Plate from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Quartz Showerhead / Gas Distribution Plate Specifications and Compatible Tools

Key specs: 150–300mm diameter, 1.5–3.5mm quartz wall thickness, gas flow 10–500 sccm, max operating temp 400°C, 1–10 Torr pressure range. Compatible with:

AMAT Centura Series 5000 (1998–2003)
Lam P5i Plasma Etch Tool (2001–2006)
Tokyo Electron Lambda DxX (2004–2009)
Incompatibility warning: Do not install on AMAT 88-8423 CVD modules (1995–2000); older designs lack the 4-hole gas manifold required for modern GDPs. Verify O-ring groove dimensions (ID 12.7mm ±0.1mm) before purchase.

What to Check Before Buying a Used Quartz Showerhead in 2026

Surface cracks: Use a 10X loupe to inspect for microfractures >50µm; reject any with radial cracks beyond the outer gas port ring.
Gas port blockage: Measure flow uniformity with a mass flow controller (MFC); deviation >±8% across ports indicates clogging.
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