✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Various (AMAT, Lam)

Used Quartz Showerhead / Gas Distribution Plate

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Various (AMAT, Lam)

Used Quartz Showerhead / Gas Distribution Plate

Name: Used Quartz Showerhead / Gas Distribution Plate
Brand: Various (AMAT, Lam)
Price: 5260 USD
Availability: InStock

Market Price

↑ Rising

$2K–$8K

Typical secondary market pricing · USD

Low $2,430Avg $5,260High $8,090

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $2K – $8K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market DataQuartz Showerhead

Trending Up

Price Range

$2K — $8K

Based on verified secondary market transactions

Last Sold

$4,800

May 3, 2026

Refurbished

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How much does a used Used Quartz Showerhead / Gas Distribution Plate cost in 2026?

A used Used Quartz Showerhead / Gas Distribution Plate from Various (AMAT, Lam) typically sells for $2k – $8k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (AMAT, Lam) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Quartz Showerhead / Gas Distribution Plate from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Quartz Showerhead / Gas Distribution Plate Cost in 2026?

Used quartz showerheads (GDPs) in 2026 range from $4,910 to $15,450, depending on OEM, size, and condition. Refurbished units (with verified flow calibration and quartz resurfacing) start at $6,200, saving buyers 45–65% compared to new parts ($11,000–$18,000). Savings drop to 30% for high-end models with plasma-resistant coatings. Caveat: Units older than 12 years (post-2014 fabrication) show >20% higher defect rates in gas port integrity tests. Always request a recent leak-test certificate (max 6-month-old data).

Quartz Showerhead / Gas Distribution Plate Specifications and Compatible Tools

Key specs: 150–300mm diameter, 1.5–3.5mm quartz wall thickness, gas flow 10–500 sccm, max operating temp 400°C, 1–10 Torr pressure range. Compatible with:

AMAT Centura Series 5000 (1998–2003)
Lam P5i Plasma Etch Tool (2001–2006)
Tokyo Electron Lambda DxX (2004–2009)
Incompatibility warning: Do not install on AMAT 88-8423 CVD modules (1995–2000); older designs lack the 4-hole gas manifold required for modern GDPs. Verify O-ring groove dimensions (ID 12.7mm ±0.1mm) before purchase.

What to Check Before Buying a Used Quartz Showerhead in 2026

Surface cracks: Use a 10X loupe to inspect for microfractures >50µm; reject any with radial cracks beyond the outer gas port ring.
Gas port blockage: Measure flow uniformity with a mass flow controller (MFC); deviation >±8% across ports indicates clogging.
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