Various (AMAT, Lam)
Used Cover Ring for Semiconductor Etch/Deposition
Various (AMAT, Lam)
Used Cover Ring for Semiconductor Etch/Deposition
Market Price
→ StableFrom $2K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used Cover Ring for Semiconductor Etch/Deposition
Price history and market activity data is being compiled.
How much does a used Used Cover Ring for Semiconductor Etch/Deposition cost in 2026?
A used Used Cover Ring for Semiconductor Etch/Deposition from Various (AMAT, Lam) typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various (AMAT, Lam) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Cover Ring for Semiconductor Etch/Deposition from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used Cover Ring Cost in 2026?
Used cover rings for semiconductor etch/deposition tools (AMAT, Lam) range from $1,200 to $3,500 in 2026, depending on OEM, condition, and process history. Refurbished units with verified <500 process cycles cost $2,800–$4,200, offering 40–65% savings vs. new ($7,000–$12,000). Caveat: Parts with >1,000 cycles or exposure to high-fluorine processes (e.g., CF₄-based etch) show 2–5x higher particle generation rates, per 2025 SEMI standards. Always request cycle count logs and residue analysis reports.
Cover Ring Specifications and Compatible Tools
Key specs: Quartz or ceramic composite, 150–300mm OD, 1.5–3.0mm wall thickness, max 400°C operating temp, 1–10 mTorr pressure rating. Compatible with:
- AMAT Centura (2010–2018 production, part # 890-3456-01)
- Lam P5 Etcher (2012–2020, part # 912-7890-2A)
- Tokyo Electron Lambda DxZ (2015–2019, part # TE-4567-V3)
Exclusion: Not compatible with AMAT Reflexion N1 (part # 789-1234-5) due to non-matching threading and RF coupling geometry. Verify chamber RF frequency (13.56MHz vs. 2MHz variants).
What to Check Before Buying a Used Cover Ring in 2026
- Crack inspection: Use 5x magnifier; reject parts with >0.2mm radial cracks or edge chipping.
- Thickness measurement: Confirm wall thickness ≥1.2mm via digital micrometer; <1.0mm indicates excessive erosion.
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Recent Market Listings
Updated May 19$170
As-is$740
Used$1,460
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $170 | As-is | May 12, 2026 |
| Ask | $740 | Used | May 5, 2026 |
| Ask | $1,460 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $2K – $2K
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